JPS5478094A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS5478094A JPS5478094A JP14688277A JP14688277A JPS5478094A JP S5478094 A JPS5478094 A JP S5478094A JP 14688277 A JP14688277 A JP 14688277A JP 14688277 A JP14688277 A JP 14688277A JP S5478094 A JPS5478094 A JP S5478094A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- metal
- element body
- photo resist
- entire surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Hall/Mr Elements (AREA)
Abstract
PURPOSE: To obtain an element with excellent magnetic effect by covering a surface, flattened by filling an insulating layer among a plural number of semiconductor element bodies formed on an insulating substrate, with a photo resist and providing an opening, by adhering a metal layer to the entire surface and by forming a metal bar touching element bodies through the opening.
CONSTITUTION: Onto insulating substrate 1 of ferrite, ceramic, glass, or the like, a high-mobility semiconductor layer of InSb or the like is adhered and photoetched to form a plural number of semiconductor-element bodies 2 at fixed intervals. Insulating layer 8 of SiO2 or a photo resist is filled among element bodies 2 to flatten its surface, the entire surface is covered with photo resist film 9, and the metal-bar formation part on element body 2 is removed. Then, In or Cu layer 4' is electrodeposited on the entire surface and metal bar 5 touching element body 2 is generated via the film-removement part. As a result, no metal layer is left at the edge of element body 2 and the metal bar becomes independent completely, so that element body 2 will serve sufficient magnetic resistance effect.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14688277A JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14688277A JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5478094A true JPS5478094A (en) | 1979-06-21 |
JPS6143876B2 JPS6143876B2 (en) | 1986-09-30 |
Family
ID=15417697
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14688277A Granted JPS5478094A (en) | 1977-12-02 | 1977-12-02 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5478094A (en) |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4922878A (en) * | 1972-06-21 | 1974-02-28 | ||
JPS4934784A (en) * | 1972-08-01 | 1974-03-30 | ||
JPS5110778A (en) * | 1974-07-17 | 1976-01-28 | Naito Densei Kogyo Co Ltd | Jidenhenkansoshi oyobi sonoseizoho |
-
1977
- 1977-12-02 JP JP14688277A patent/JPS5478094A/en active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4922878A (en) * | 1972-06-21 | 1974-02-28 | ||
JPS4934784A (en) * | 1972-08-01 | 1974-03-30 | ||
JPS5110778A (en) * | 1974-07-17 | 1976-01-28 | Naito Densei Kogyo Co Ltd | Jidenhenkansoshi oyobi sonoseizoho |
Also Published As
Publication number | Publication date |
---|---|
JPS6143876B2 (en) | 1986-09-30 |
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