JPS6142137A - 非ネストバイアを有する層状構造物の製造方法 - Google Patents

非ネストバイアを有する層状構造物の製造方法

Info

Publication number
JPS6142137A
JPS6142137A JP16016784A JP16016784A JPS6142137A JP S6142137 A JPS6142137 A JP S6142137A JP 16016784 A JP16016784 A JP 16016784A JP 16016784 A JP16016784 A JP 16016784A JP S6142137 A JPS6142137 A JP S6142137A
Authority
JP
Japan
Prior art keywords
layer
manufacturing
metal
etch barrier
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16016784A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0574219B2 (enExample
Inventor
スチーブン　ジエームス　ローデス
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Plessey Overseas Ltd
Original Assignee
Plessey Overseas Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Plessey Overseas Ltd filed Critical Plessey Overseas Ltd
Priority to JP16016784A priority Critical patent/JPS6142137A/ja
Publication of JPS6142137A publication Critical patent/JPS6142137A/ja
Publication of JPH0574219B2 publication Critical patent/JPH0574219B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Laminated Bodies (AREA)
  • Physical Vapour Deposition (AREA)
JP16016784A 1984-07-30 1984-07-30 非ネストバイアを有する層状構造物の製造方法 Granted JPS6142137A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16016784A JPS6142137A (ja) 1984-07-30 1984-07-30 非ネストバイアを有する層状構造物の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16016784A JPS6142137A (ja) 1984-07-30 1984-07-30 非ネストバイアを有する層状構造物の製造方法

Publications (2)

Publication Number Publication Date
JPS6142137A true JPS6142137A (ja) 1986-02-28
JPH0574219B2 JPH0574219B2 (enExample) 1993-10-18

Family

ID=15709300

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16016784A Granted JPS6142137A (ja) 1984-07-30 1984-07-30 非ネストバイアを有する層状構造物の製造方法

Country Status (1)

Country Link
JP (1) JPS6142137A (enExample)

Also Published As

Publication number Publication date
JPH0574219B2 (enExample) 1993-10-18

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