JPS613662U - ２次電子検出装置 - Google Patents

２次電子検出装置

Info

Publication number
JPS613662U
JPS613662U JP8685584U JP8685584U JPS613662U JP S613662 U JPS613662 U JP S613662U JP 8685584 U JP8685584 U JP 8685584U JP 8685584 U JP8685584 U JP 8685584U JP S613662 U JPS613662 U JP S613662U
Authority
JP
Japan
Prior art keywords
secondary electron
detector
detection device
electron
optical axis
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8685584U
Other languages
English (en)
Other versions
JPH0535558Y2 (ja
Inventor
健 富田
正志 岩槻
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP8685584U priority Critical patent/JPS613662U/ja
Publication of JPS613662U publication Critical patent/JPS613662U/ja
Application granted granted Critical
Publication of JPH0535558Y2 publication Critical patent/JPH0535558Y2/ja
Granted legal-status Critical Current

Links

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【図面の簡単な説明】
第１図は本考案の一実施例の構成図、第２図は第１図の
実施例装置の要部の拡大図である。 １：電子銃、２：電子線、３：試料、４，５：対物レン
ズ磁極片、６：２次電子検出器、７：鏡筒、８：シール
部材、９：検出器ホルダー、１０：ステツピングモータ
、１１：移動棒、１２：ラツク、１３：ピニオン、１４
：シンチレータ−、１５：ライトパイプ、１６：２次電
子捕捉電極、１７：シールド筒、１８：駆動電源、１９
：加速電源、２０：制御回路。

Claims (1)

    【実用新案登録請求の範囲】
  1. 電子銃から光軸Ｚに沿って取り出された電子線を加速し
    て試料に照射する手段、該電子線の加速電圧を切り換え
    るための切り換え手段、該試料よりの２次電子を２次電
    子検出器に導いて検出する、手段を具備した装置におい
    て、前記２次電子検出器と光軸Ｚとの距離を変化させる
    ための検出器位置移動手段と、前記切り換え手段による
    加速電圧の切り換えに連動して該検出器位置移動手段を
    駆動する手段を備えたことを特徴とする２次電子検出装
    置。
JP8685584U 1984-06-12 1984-06-12 ２次電子検出装置 Granted JPS613662U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8685584U JPS613662U (ja) 1984-06-12 1984-06-12 ２次電子検出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8685584U JPS613662U (ja) 1984-06-12 1984-06-12 ２次電子検出装置

Publications (2)

Publication Number Publication Date
JPS613662U true JPS613662U (ja) 1986-01-10
JPH0535558Y2 JPH0535558Y2 (ja) 1993-09-09

Family

ID=30638535

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8685584U Granted JPS613662U (ja) 1984-06-12 1984-06-12 ２次電子検出装置

Country Status (1)

Country Link
JP (1) JPS613662U (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0331956U (ja) * 1989-08-07 1991-03-28

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514683A (en) * 1978-07-19 1980-02-01 Jeol Ltd Reflected electron detector for scan electronic microscope
JPS5568059A (en) * 1978-11-17 1980-05-22 Jeol Ltd Automatic position setter for reflective electron beam detector in scanning electronic microscope

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5514683A (en) * 1978-07-19 1980-02-01 Jeol Ltd Reflected electron detector for scan electronic microscope
JPS5568059A (en) * 1978-11-17 1980-05-22 Jeol Ltd Automatic position setter for reflective electron beam detector in scanning electronic microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0331956U (ja) * 1989-08-07 1991-03-28

Also Published As

Publication number Publication date
JPH0535558Y2 (ja) 1993-09-09

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