JPS6127177Y2 - - Google Patents

Info

Publication number
JPS6127177Y2
JPS6127177Y2 JP1979132753U JP13275379U JPS6127177Y2 JP S6127177 Y2 JPS6127177 Y2 JP S6127177Y2 JP 1979132753 U JP1979132753 U JP 1979132753U JP 13275379 U JP13275379 U JP 13275379U JP S6127177 Y2 JPS6127177 Y2 JP S6127177Y2
Authority
JP
Japan
Prior art keywords
film
semiconductor device
moisture
layer
psg
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1979132753U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5651349U (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1979132753U priority Critical patent/JPS6127177Y2/ja
Publication of JPS5651349U publication Critical patent/JPS5651349U/ja
Application granted granted Critical
Publication of JPS6127177Y2 publication Critical patent/JPS6127177Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP1979132753U 1979-09-26 1979-09-26 Expired JPS6127177Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1979132753U JPS6127177Y2 (enrdf_load_stackoverflow) 1979-09-26 1979-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1979132753U JPS6127177Y2 (enrdf_load_stackoverflow) 1979-09-26 1979-09-26

Publications (2)

Publication Number Publication Date
JPS5651349U JPS5651349U (enrdf_load_stackoverflow) 1981-05-07
JPS6127177Y2 true JPS6127177Y2 (enrdf_load_stackoverflow) 1986-08-13

Family

ID=29364360

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1979132753U Expired JPS6127177Y2 (enrdf_load_stackoverflow) 1979-09-26 1979-09-26

Country Status (1)

Country Link
JP (1) JPS6127177Y2 (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4114971A (en) * 1976-09-30 1978-09-19 Van Products, A Division Of Standex International Corporation Cluster assembly and block therefor

Also Published As

Publication number Publication date
JPS5651349U (enrdf_load_stackoverflow) 1981-05-07

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