JPS6025750U - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS6025750U
JPS6025750U JP11612683U JP11612683U JPS6025750U JP S6025750 U JPS6025750 U JP S6025750U JP 11612683 U JP11612683 U JP 11612683U JP 11612683 U JP11612683 U JP 11612683U JP S6025750 U JPS6025750 U JP S6025750U
Authority
JP
Japan
Prior art keywords
vapor phase
phase growth
growth equipment
turntable
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11612683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6138913Y2 (ko
Inventor
林　善夫
今井　利郎
Original Assignee
ロ−ム株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ロ−ム株式会社 filed Critical ロ−ム株式会社
Priority to JP11612683U priority Critical patent/JPS6025750U/ja
Publication of JPS6025750U publication Critical patent/JPS6025750U/ja
Application granted granted Critical
Publication of JPS6138913Y2 publication Critical patent/JPS6138913Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP11612683U 1983-07-25 1983-07-25 気相成長装置 Granted JPS6025750U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11612683U JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11612683U JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6025750U true JPS6025750U (ja) 1985-02-21
JPS6138913Y2 JPS6138913Y2 (ko) 1986-11-08

Family

ID=30267820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11612683U Granted JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6025750U (ko)

Also Published As

Publication number Publication date
JPS6138913Y2 (ko) 1986-11-08

Similar Documents

Publication Publication Date Title
JPS6025750U (ja) 気相成長装置
JPS59145031U (ja) ドライエツチング装置
JPS59185828U (ja) 半導体製造装置
JPS5812941U (ja) 気相成長装置用サセプタ
JPS59131148U (ja) 縦形気相成長装置
JPS6013971U (ja) 気相成長装置
JPS6016535U (ja) 気相成長装置
JPS59103770U (ja) 薄膜気相成長装置
JPS599084U (ja) 化学的気相成長装置
JPS6013740U (ja) 試料保持装置
JPS58155370U (ja) シリコン単結晶製造装置
JPS5924132U (ja) マイクロ波プラズマ処理装置
JPS60149131U (ja) 気相成長装置
JPS596836U (ja) 薄膜気相成長装置
JPS6059530U (ja) プラズマ処理装置
JPS5980464U (ja) 蒸着装置
JPS59117136U (ja) エピタキシヤル成長装置用サセプタ−
JPS61164024U (ko)
JPS6433576U (ko)
JPS58160263U (ja) Ｇｄ−ｃｖｄ装置
JPS5969964U (ja) 成膜装置
JPS58151666U (ja) プラズマ・エツチング装置
JPS6057125U (ja) 半導体気相成長装置
JPS59169348U (ja) 真空蒸着装置の基板加熱体
JPS60140773U (ja) 分子線結晶成長装置