JPS61164024U - - Google Patents
Info
- Publication number
- JPS61164024U JPS61164024U JP3351785U JP3351785U JPS61164024U JP S61164024 U JPS61164024 U JP S61164024U JP 3351785 U JP3351785 U JP 3351785U JP 3351785 U JP3351785 U JP 3351785U JP S61164024 U JPS61164024 U JP S61164024U
- Authority
- JP
- Japan
- Prior art keywords
- etching
- electrode
- tank
- etching atmosphere
- atmosphere space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 6
- 238000001312 dry etching Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000012495 reaction gas Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3351785U JPS61164024U (ko) | 1985-03-08 | 1985-03-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3351785U JPS61164024U (ko) | 1985-03-08 | 1985-03-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61164024U true JPS61164024U (ko) | 1986-10-11 |
Family
ID=30536043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3351785U Pending JPS61164024U (ko) | 1985-03-08 | 1985-03-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61164024U (ko) |
-
1985
- 1985-03-08 JP JP3351785U patent/JPS61164024U/ja active Pending