JPH0165131U - - Google Patents
Info
- Publication number
- JPH0165131U JPH0165131U JP1987159872U JP15987287U JPH0165131U JP H0165131 U JPH0165131 U JP H0165131U JP 1987159872 U JP1987159872 U JP 1987159872U JP 15987287 U JP15987287 U JP 15987287U JP H0165131 U JPH0165131 U JP H0165131U
- Authority
- JP
- Japan
- Prior art keywords
- sample
- electrode
- lower electrode
- insulating material
- sample stand
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 3
- 239000012212 insulator Substances 0.000 claims description 2
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159872U JPH0165131U (ko) | 1987-10-21 | 1987-10-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987159872U JPH0165131U (ko) | 1987-10-21 | 1987-10-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0165131U true JPH0165131U (ko) | 1989-04-26 |
Family
ID=31441453
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987159872U Pending JPH0165131U (ko) | 1987-10-21 | 1987-10-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0165131U (ko) |
-
1987
- 1987-10-21 JP JP1987159872U patent/JPH0165131U/ja active Pending