JPH024237U - - Google Patents
Info
- Publication number
- JPH024237U JPH024237U JP8271288U JP8271288U JPH024237U JP H024237 U JPH024237 U JP H024237U JP 8271288 U JP8271288 U JP 8271288U JP 8271288 U JP8271288 U JP 8271288U JP H024237 U JPH024237 U JP H024237U
- Authority
- JP
- Japan
- Prior art keywords
- dry etching
- electrode
- etching device
- semiconductor substrate
- thermocouple
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 238000001312 dry etching Methods 0.000 claims 3
- 238000009529 body temperature measurement Methods 0.000 claims 1
- 239000010409 thin film Substances 0.000 claims 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8271288U JPH024237U (ko) | 1988-06-21 | 1988-06-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8271288U JPH024237U (ko) | 1988-06-21 | 1988-06-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH024237U true JPH024237U (ko) | 1990-01-11 |
Family
ID=31307455
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8271288U Pending JPH024237U (ko) | 1988-06-21 | 1988-06-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH024237U (ko) |
-
1988
- 1988-06-21 JP JP8271288U patent/JPH024237U/ja active Pending