JPS60231386A - パタ−ン形成方法 - Google Patents
パタ−ン形成方法Info
- Publication number
- JPS60231386A JPS60231386A JP8757484A JP8757484A JPS60231386A JP S60231386 A JPS60231386 A JP S60231386A JP 8757484 A JP8757484 A JP 8757484A JP 8757484 A JP8757484 A JP 8757484A JP S60231386 A JPS60231386 A JP S60231386A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- etching
- substrate
- glaze layer
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 9
- 238000005530 etching Methods 0.000 claims description 30
- 239000000758 substrate Substances 0.000 claims description 25
- 239000000919 ceramic Substances 0.000 claims description 10
- 230000007261 regionalization Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 239000010409 thin film Substances 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 2
- 238000004544 sputter deposition Methods 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- MMOXZBCLCQITDF-UHFFFAOYSA-N N,N-diethyl-m-toluamide Chemical compound CCN(CC)C(=O)C1=CC=CC(C)=C1 MMOXZBCLCQITDF-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
Landscapes
- Manufacturing Of Printed Circuit Boards (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8757484A JPS60231386A (ja) | 1984-04-28 | 1984-04-28 | パタ−ン形成方法 |
| JP32301989A JPH02216890A (ja) | 1984-04-28 | 1989-12-13 | パターン形成方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8757484A JPS60231386A (ja) | 1984-04-28 | 1984-04-28 | パタ−ン形成方法 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP32301989A Division JPH02216890A (ja) | 1984-04-28 | 1989-12-13 | パターン形成方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60231386A true JPS60231386A (ja) | 1985-11-16 |
| JPH0231872B2 JPH0231872B2 (enrdf_load_stackoverflow) | 1990-07-17 |
Family
ID=13918769
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8757484A Granted JPS60231386A (ja) | 1984-04-28 | 1984-04-28 | パタ−ン形成方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60231386A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4751142A (en) * | 1985-09-18 | 1988-06-14 | Kyocera Corporation | Magneto-optical recording element |
| JPH02216890A (ja) * | 1984-04-28 | 1990-08-29 | Rohm Co Ltd | パターン形成方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54152163A (en) * | 1978-05-22 | 1979-11-30 | Shinetsu Polymer Co | Circuit board and method of producing same |
| JPS56131992A (en) * | 1980-03-19 | 1981-10-15 | Tokyo Shibaura Electric Co | Glazed board |
-
1984
- 1984-04-28 JP JP8757484A patent/JPS60231386A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS54152163A (en) * | 1978-05-22 | 1979-11-30 | Shinetsu Polymer Co | Circuit board and method of producing same |
| JPS56131992A (en) * | 1980-03-19 | 1981-10-15 | Tokyo Shibaura Electric Co | Glazed board |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02216890A (ja) * | 1984-04-28 | 1990-08-29 | Rohm Co Ltd | パターン形成方法 |
| US4751142A (en) * | 1985-09-18 | 1988-06-14 | Kyocera Corporation | Magneto-optical recording element |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0231872B2 (enrdf_load_stackoverflow) | 1990-07-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |