JPS5637817A - Thin-film magnetic head and its manufacture - Google Patents
Thin-film magnetic head and its manufactureInfo
- Publication number
- JPS5637817A JPS5637817A JP11312379A JP11312379A JPS5637817A JP S5637817 A JPS5637817 A JP S5637817A JP 11312379 A JP11312379 A JP 11312379A JP 11312379 A JP11312379 A JP 11312379A JP S5637817 A JPS5637817 A JP S5637817A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- resist
- nonmagnetic
- stacked
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Magnetic Heads (AREA)
- Error Detection And Correction (AREA)
Abstract
PURPOSE: To eliminate variance in magnetic characteristics by obtanining narrow track width easily with precision by forming a couple of nonmagnetic layers on both track-width-directional sides of the magnetic layer of a magnetic gap part.
CONSTITUTION: After conductor pattern 2 on magnetic substrate 1, nonmagnetic insulating layer 4 and conductor pattern 3 on layer 4 are formed by being stacked succesively, nonmagnetic insulating layer 5 serving as gap part A is stacked. On layer 5, resist 14 is formed in the same shape and at the same position with magnetic layer 6 to be stacked later. Next, after nonmagnetic layer 13 is formed of SiO, etc., by vapor deposition, etc., near gap A, resist 14 is peeled off to remove nonmagnetic layer 13 on resist 14, forming a couple of nonmagnetic layers 13. After magnetic layer 6 is formed, resist 15 is applied on layer 6, exposed with a pattern and processed to remove a part other than resist part 15a and then excessive magnetic layer 6 is removed by etching. Next, protective layer 9, adhesive layer 10 and holding plate 11 are stacked. Thus, track width Tw of gap part magnetic layer 6 can be obtained with precision.
COPYRIGHT: (C)1981,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11312379A JPS6022405B2 (en) | 1979-08-31 | 1979-08-31 | Manufacturing method of thin film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11312379A JPS6022405B2 (en) | 1979-08-31 | 1979-08-31 | Manufacturing method of thin film magnetic head |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5637817A true JPS5637817A (en) | 1981-04-11 |
JPS6022405B2 JPS6022405B2 (en) | 1985-06-01 |
Family
ID=14604100
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11312379A Expired JPS6022405B2 (en) | 1979-08-31 | 1979-08-31 | Manufacturing method of thin film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6022405B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6299907A (en) * | 1985-10-25 | 1987-05-09 | Hitachi Ltd | Thin film magnetic head |
JPH08227506A (en) * | 1994-10-27 | 1996-09-03 | Samsung Electron Co Ltd | Manufacture of recording/reproduction composite type thin-film magnetic head |
-
1979
- 1979-08-31 JP JP11312379A patent/JPS6022405B2/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6299907A (en) * | 1985-10-25 | 1987-05-09 | Hitachi Ltd | Thin film magnetic head |
JPH08227506A (en) * | 1994-10-27 | 1996-09-03 | Samsung Electron Co Ltd | Manufacture of recording/reproduction composite type thin-film magnetic head |
Also Published As
Publication number | Publication date |
---|---|
JPS6022405B2 (en) | 1985-06-01 |
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