JPS5637817A - Thin-film magnetic head and its manufacture - Google Patents

Thin-film magnetic head and its manufacture

Info

Publication number
JPS5637817A
JPS5637817A JP11312379A JP11312379A JPS5637817A JP S5637817 A JPS5637817 A JP S5637817A JP 11312379 A JP11312379 A JP 11312379A JP 11312379 A JP11312379 A JP 11312379A JP S5637817 A JPS5637817 A JP S5637817A
Authority
JP
Japan
Prior art keywords
layer
magnetic
resist
nonmagnetic
stacked
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11312379A
Other languages
Japanese (ja)
Other versions
JPS6022405B2 (en
Inventor
Nobumasa Kaminaka
Kenji Kanai
Kidai Nochi
Noboru Nomura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP11312379A priority Critical patent/JPS6022405B2/en
Publication of JPS5637817A publication Critical patent/JPS5637817A/en
Publication of JPS6022405B2 publication Critical patent/JPS6022405B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)
  • Error Detection And Correction (AREA)

Abstract

PURPOSE: To eliminate variance in magnetic characteristics by obtanining narrow track width easily with precision by forming a couple of nonmagnetic layers on both track-width-directional sides of the magnetic layer of a magnetic gap part.
CONSTITUTION: After conductor pattern 2 on magnetic substrate 1, nonmagnetic insulating layer 4 and conductor pattern 3 on layer 4 are formed by being stacked succesively, nonmagnetic insulating layer 5 serving as gap part A is stacked. On layer 5, resist 14 is formed in the same shape and at the same position with magnetic layer 6 to be stacked later. Next, after nonmagnetic layer 13 is formed of SiO, etc., by vapor deposition, etc., near gap A, resist 14 is peeled off to remove nonmagnetic layer 13 on resist 14, forming a couple of nonmagnetic layers 13. After magnetic layer 6 is formed, resist 15 is applied on layer 6, exposed with a pattern and processed to remove a part other than resist part 15a and then excessive magnetic layer 6 is removed by etching. Next, protective layer 9, adhesive layer 10 and holding plate 11 are stacked. Thus, track width Tw of gap part magnetic layer 6 can be obtained with precision.
COPYRIGHT: (C)1981,JPO&Japio
JP11312379A 1979-08-31 1979-08-31 Manufacturing method of thin film magnetic head Expired JPS6022405B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11312379A JPS6022405B2 (en) 1979-08-31 1979-08-31 Manufacturing method of thin film magnetic head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11312379A JPS6022405B2 (en) 1979-08-31 1979-08-31 Manufacturing method of thin film magnetic head

Publications (2)

Publication Number Publication Date
JPS5637817A true JPS5637817A (en) 1981-04-11
JPS6022405B2 JPS6022405B2 (en) 1985-06-01

Family

ID=14604100

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11312379A Expired JPS6022405B2 (en) 1979-08-31 1979-08-31 Manufacturing method of thin film magnetic head

Country Status (1)

Country Link
JP (1) JPS6022405B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6299907A (en) * 1985-10-25 1987-05-09 Hitachi Ltd Thin film magnetic head
JPH08227506A (en) * 1994-10-27 1996-09-03 Samsung Electron Co Ltd Manufacture of recording/reproduction composite type thin-film magnetic head

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6299907A (en) * 1985-10-25 1987-05-09 Hitachi Ltd Thin film magnetic head
JPH08227506A (en) * 1994-10-27 1996-09-03 Samsung Electron Co Ltd Manufacture of recording/reproduction composite type thin-film magnetic head

Also Published As

Publication number Publication date
JPS6022405B2 (en) 1985-06-01

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