JPS57113411A - Thin-film head - Google Patents

Thin-film head

Info

Publication number
JPS57113411A
JPS57113411A JP18617180A JP18617180A JPS57113411A JP S57113411 A JPS57113411 A JP S57113411A JP 18617180 A JP18617180 A JP 18617180A JP 18617180 A JP18617180 A JP 18617180A JP S57113411 A JPS57113411 A JP S57113411A
Authority
JP
Japan
Prior art keywords
film
layer
magnetic material
recessed part
insulating layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18617180A
Other languages
Japanese (ja)
Inventor
Masaaki Hayashi
Hiroshi Tsuchiya
Hiroji Kawakami
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Computer Basic Technology Research Association Corp
Original Assignee
Computer Basic Technology Research Association Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Computer Basic Technology Research Association Corp filed Critical Computer Basic Technology Research Association Corp
Priority to JP18617180A priority Critical patent/JPS57113411A/en
Publication of JPS57113411A publication Critical patent/JPS57113411A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3163—Fabrication methods or processes specially adapted for a particular head structure, e.g. using base layers for electroplating, using functional layers for masking, using energy or particle beams for shaping the structure or modifying the properties of the basic layers
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination

Abstract

PURPOSE:To improve the size precision of the track-width work of a thin-film head by forming a recessed part in a substrate or an insulating protective film provided on the substrate, and successively laminating a lower magnetic material layer, an insulating layer, conductor layers surrounded with the insulating layer, and an upper magnetic material layer on the recessed part. CONSTITUTION:On a substrate 12 serving as a slider, an insulating layer 13 of Al2O3, etc., is formed thickly by sputtering, etc. a recessed part is made, and a lower magnetic material 14 is vapor-deposited on the layer 13 including the recessed part. An insulating layer 15 is formed on the magnetic material 14, and conductor layers 16 are formed by vapor deposition or etching and then surrounded with an insulator 17 so that the surface of the magnetic material layer 14 and that of the insulator 17 are in the same plane. A gap forming material (Al2O3, etc.) film 18 is formed on the insulators 15 and 17, and the front gap part of the lower magnetic layer 14. An upper magnetic material film 19 is formed in the area 20 of the magnetic layer 14 and covering the film 18. Thus, the film 19 is nearly flattened to nearly flatten the photoresist film during track-width formation and also to obtain sufficient adhesion, so that the precesion of track width is prevented from being lowered owing to a light diffraction phenomenon.
JP18617180A 1980-12-30 1980-12-30 Thin-film head Pending JPS57113411A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18617180A JPS57113411A (en) 1980-12-30 1980-12-30 Thin-film head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18617180A JPS57113411A (en) 1980-12-30 1980-12-30 Thin-film head

Publications (1)

Publication Number Publication Date
JPS57113411A true JPS57113411A (en) 1982-07-14

Family

ID=16183629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18617180A Pending JPS57113411A (en) 1980-12-30 1980-12-30 Thin-film head

Country Status (1)

Country Link
JP (1) JPS57113411A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61220113A (en) * 1985-03-26 1986-09-30 Victor Co Of Japan Ltd Thin film magnetic head and its production
JPS62229512A (en) * 1986-03-31 1987-10-08 Hitachi Ltd Thin film magnetic head and its production
US4853815A (en) * 1984-12-21 1989-08-01 Siemens Aktiengesellschaft Magnetic thin-film head on a nonmagnetic substrate for vertical mangetization
EP0580368A2 (en) * 1992-07-21 1994-01-26 Seagate Technology International Studless thin film magnetic head and process for making the same
US5793578A (en) * 1996-11-15 1998-08-11 International Business Machines Corporation Thin film induction recording head having an inset first insulation layer that defines zero throat height and pole tip apex angle
US5820770A (en) * 1992-07-21 1998-10-13 Seagate Technology, Inc. Thin film magnetic head including vias formed in alumina layer and process for making the same
US7120989B2 (en) * 2004-02-18 2006-10-17 Headway Technologies, Inc. Process of manufacturing a perpendicular magnetic pole structure
US7251878B2 (en) * 2004-06-30 2007-08-07 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for defining leading edge taper of a write pole tip

Cited By (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4853815A (en) * 1984-12-21 1989-08-01 Siemens Aktiengesellschaft Magnetic thin-film head on a nonmagnetic substrate for vertical mangetization
JPS61220113A (en) * 1985-03-26 1986-09-30 Victor Co Of Japan Ltd Thin film magnetic head and its production
JPS62229512A (en) * 1986-03-31 1987-10-08 Hitachi Ltd Thin film magnetic head and its production
EP0938079A2 (en) * 1992-07-21 1999-08-25 Seagate Technology International Studless thin film magnetic head and process for making the same
EP0580368A3 (en) * 1992-07-21 1996-03-20 Seagate Technology Studless thin film magnetic head and process for making the same
US5659451A (en) * 1992-07-21 1997-08-19 Seagate Technology, Inc. Studless thin film magnetic head and process for making the same
US5820770A (en) * 1992-07-21 1998-10-13 Seagate Technology, Inc. Thin film magnetic head including vias formed in alumina layer and process for making the same
EP0580368A2 (en) * 1992-07-21 1994-01-26 Seagate Technology International Studless thin film magnetic head and process for making the same
EP0938079A3 (en) * 1992-07-21 1999-09-15 Seagate Technology International Studless thin film magnetic head and process for making the same
US6059984A (en) * 1992-07-21 2000-05-09 Seagate Technology, Inc. Process for fabricating thin film magnetic head including crater for recessed structure
US5793578A (en) * 1996-11-15 1998-08-11 International Business Machines Corporation Thin film induction recording head having an inset first insulation layer that defines zero throat height and pole tip apex angle
US5935644A (en) * 1996-11-15 1999-08-10 International Business Machines Corporation Method of making thin film induction recording head having an inset first insulation layer that defines zero throat height and pole tip apex angle
US7120989B2 (en) * 2004-02-18 2006-10-17 Headway Technologies, Inc. Process of manufacturing a perpendicular magnetic pole structure
US7251878B2 (en) * 2004-06-30 2007-08-07 Hitachi Global Storage Technologies Netherlands B.V. Method and apparatus for defining leading edge taper of a write pole tip

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