JPS5532203A - Manufacture of thin-film magnetic head - Google Patents
Manufacture of thin-film magnetic headInfo
- Publication number
- JPS5532203A JPS5532203A JP10186978A JP10186978A JPS5532203A JP S5532203 A JPS5532203 A JP S5532203A JP 10186978 A JP10186978 A JP 10186978A JP 10186978 A JP10186978 A JP 10186978A JP S5532203 A JPS5532203 A JP S5532203A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- magnetic
- gap
- conductor
- flattening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Magnetic Heads (AREA)
Abstract
PURPOSE: To fix the width of a gap precisely within a fixed size by forming another layer after flattening a formed layer on each formation of respective layers at a winding part and magnetic circuit part.
CONSTITUTION: The patterning of a magnetic layer is performed by a thin film of Al, etc., easy to pattern and excellent in airtightness, only a part where a magnetic layer is formed is etched, and lift-off flattening is done by filling up the formed concave part with the magnetic layer. As for the formation of a pattern of the conductor layer of a coil, flattening is done by spin-coating after lift-off from an insulating film or conductor patterning. In a process where the conductor layer is made into an insulated layer, a temporarily dummy conductor layer is formed and after a temporarily dummy conductor is removed and substituted with a magnetic film, the magnetic film is stacked. As a result, unevenness is made in gap formation even if several layers are stacked. Therefore, rectangular gap 25 of gap width Wt less than a fixed size is formed on tape opposite surface 26 of magnetic layer 23 of substrate 21.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10186978A JPS5532203A (en) | 1978-08-23 | 1978-08-23 | Manufacture of thin-film magnetic head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10186978A JPS5532203A (en) | 1978-08-23 | 1978-08-23 | Manufacture of thin-film magnetic head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5532203A true JPS5532203A (en) | 1980-03-06 |
Family
ID=14311985
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10186978A Pending JPS5532203A (en) | 1978-08-23 | 1978-08-23 | Manufacture of thin-film magnetic head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5532203A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4511129A (en) * | 1982-10-25 | 1985-04-16 | Toyo Kogyo Co., Ltd. | Quarter-window structure for vehicle |
-
1978
- 1978-08-23 JP JP10186978A patent/JPS5532203A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4511129A (en) * | 1982-10-25 | 1985-04-16 | Toyo Kogyo Co., Ltd. | Quarter-window structure for vehicle |
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