JPS5693113A - Thin-film magnetic head - Google Patents

Thin-film magnetic head

Info

Publication number
JPS5693113A
JPS5693113A JP16915679A JP16915679A JPS5693113A JP S5693113 A JPS5693113 A JP S5693113A JP 16915679 A JP16915679 A JP 16915679A JP 16915679 A JP16915679 A JP 16915679A JP S5693113 A JPS5693113 A JP S5693113A
Authority
JP
Japan
Prior art keywords
film
magnetic head
thin
layer
addition polymerization
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16915679A
Other languages
Japanese (ja)
Inventor
Minoru Nakajima
Shiro Takeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP16915679A priority Critical patent/JPS5693113A/en
Priority to EP80301413A priority patent/EP0019391B1/en
Priority to DE8080301413T priority patent/DE3060913D1/en
Priority to US06/148,722 priority patent/US4347306A/en
Publication of JPS5693113A publication Critical patent/JPS5693113A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Abstract

PURPOSE:To obtain a highly reliable thin-film magnetic head which is free from the film defect such as a swell or the like to the insulator layer and with no occurrence of the disconnection, short circuit and others, by forming each of the 1st and 2nd insulator layers with the hardened addition polymerization type polyimide. CONSTITUTION:The addition polymerization type polyimide solution is applied on the lower magnetic film 2 such as the permalloy or the like provided on the substrate 1 to be hardened after the drying and heating treating and then subjected to a patterning by hydrazine or O2 plasma to form the insulator layer 3. Then a coil is formed with the conductor laye 4 of Al or the like, and the insulator layer 5 consisting of the further highly hardened addition polymerization type polyimide same as that mentioned above is formed on the coil. Furthermore, the magnetic substance layer 6 is formed on layer 5. In such way, a thin-film magnetic head having a high reliability with no defects such as the disconnection, short circuit and the like and free from the film defect such as the swell of the insulator layers 3 and 5 is obtained.
JP16915679A 1979-05-12 1979-12-27 Thin-film magnetic head Pending JPS5693113A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP16915679A JPS5693113A (en) 1979-12-27 1979-12-27 Thin-film magnetic head
EP80301413A EP0019391B1 (en) 1979-05-12 1980-04-30 Improvement in method of manufacturing electronic device having multilayer wiring structure
DE8080301413T DE3060913D1 (en) 1979-05-12 1980-04-30 Improvement in method of manufacturing electronic device having multilayer wiring structure
US06/148,722 US4347306A (en) 1979-05-12 1980-05-12 Method of manufacturing electronic device having multilayer wiring structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16915679A JPS5693113A (en) 1979-12-27 1979-12-27 Thin-film magnetic head

Publications (1)

Publication Number Publication Date
JPS5693113A true JPS5693113A (en) 1981-07-28

Family

ID=15881316

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16915679A Pending JPS5693113A (en) 1979-05-12 1979-12-27 Thin-film magnetic head

Country Status (1)

Country Link
JP (1) JPS5693113A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823315A (en) * 1981-08-03 1983-02-12 Hitachi Ltd Thin film magnetic head
JPS5977612A (en) * 1982-10-25 1984-05-04 Trio Kenwood Corp Multilayer winding type thin film magnetic head
JPS59186204A (en) * 1983-04-05 1984-10-23 株式会社日立製作所 Method of forming wiring structure

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5823315A (en) * 1981-08-03 1983-02-12 Hitachi Ltd Thin film magnetic head
JPH0345445B2 (en) * 1981-08-03 1991-07-11 Hitachi Ltd
JPS5977612A (en) * 1982-10-25 1984-05-04 Trio Kenwood Corp Multilayer winding type thin film magnetic head
JPS59186204A (en) * 1983-04-05 1984-10-23 株式会社日立製作所 Method of forming wiring structure
JPH0125162B2 (en) * 1983-04-05 1989-05-16 Hitachi Ltd

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