JPS57122508A - Manufacture magnetic bubble device - Google Patents

Manufacture magnetic bubble device

Info

Publication number
JPS57122508A
JPS57122508A JP863181A JP863181A JPS57122508A JP S57122508 A JPS57122508 A JP S57122508A JP 863181 A JP863181 A JP 863181A JP 863181 A JP863181 A JP 863181A JP S57122508 A JPS57122508 A JP S57122508A
Authority
JP
Japan
Prior art keywords
film
pattern
permalloy
insulator
bubble device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP863181A
Other languages
Japanese (ja)
Inventor
Keiji Harada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP863181A priority Critical patent/JPS57122508A/en
Publication of JPS57122508A publication Critical patent/JPS57122508A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/32—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film
    • H01F41/34—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying conductive, insulating or magnetic material on a magnetic film, specially adapted for a thin magnetic film in patterns, e.g. by lithography

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE:To improve magnetic characteristic for preventing deterioration of the magnetic characteristic by a method wherein after forming a conductive pattern, an insulator film of organic substance is deposited, on which an insulator film of inorganic substance and a permalloy film are produced successively. CONSTITUTION:A SiO2 film as an insulator film of inorganic substance 2 is formed by RF sputtering process on a garnet film 1 for a bubble device, and further an Al-Cu conductive film is coated on the SiO2 film. Next, a film 3 is formed in a desired pattern by fine pattern technology, coating with polyimide resin 4 as the insulator film of organic substance by spin coatin process. Then, it is cured, for example, at 360 deg.C for 120min. After this, the SiO2 film 6 and the permalloy film 5 are formed successively by RF sputtering, and a permalloy pattern is produced by fine pattern technology. A protective film is provded all over the surfaces including the pattern 5, and parts of the protective coating at bonding pads and the insulator film of organic substance are removed for forming a magnetic bubble device.
JP863181A 1981-01-23 1981-01-23 Manufacture magnetic bubble device Pending JPS57122508A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP863181A JPS57122508A (en) 1981-01-23 1981-01-23 Manufacture magnetic bubble device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP863181A JPS57122508A (en) 1981-01-23 1981-01-23 Manufacture magnetic bubble device

Publications (1)

Publication Number Publication Date
JPS57122508A true JPS57122508A (en) 1982-07-30

Family

ID=11698294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP863181A Pending JPS57122508A (en) 1981-01-23 1981-01-23 Manufacture magnetic bubble device

Country Status (1)

Country Link
JP (1) JPS57122508A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112487A (en) * 1982-12-20 1984-06-28 Fujitsu Ltd Manufacture of bubble memory device
EP0154524A2 (en) * 1984-03-03 1985-09-11 Fujitsu Limited Process for manufacturing a magnetic bubble memory chip

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59112487A (en) * 1982-12-20 1984-06-28 Fujitsu Ltd Manufacture of bubble memory device
JPS6228511B2 (en) * 1982-12-20 1987-06-20 Fujitsu Ltd
EP0154524A2 (en) * 1984-03-03 1985-09-11 Fujitsu Limited Process for manufacturing a magnetic bubble memory chip

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