JPS641215A - Manufacture of magnetic thin film - Google Patents

Manufacture of magnetic thin film

Info

Publication number
JPS641215A
JPS641215A JP15626087A JP15626087A JPS641215A JP S641215 A JPS641215 A JP S641215A JP 15626087 A JP15626087 A JP 15626087A JP 15626087 A JP15626087 A JP 15626087A JP S641215 A JPS641215 A JP S641215A
Authority
JP
Japan
Prior art keywords
film
thin film
masking material
magnetic thin
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15626087A
Other languages
Japanese (ja)
Other versions
JPH06105668B2 (en
JPH011215A (en
Inventor
Shinichi Hara
Masatoshi Tsuchiya
Makoto Morijiri
Takashi Kawabe
Masanobu Hanazono
Giichi Tsuji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP15626087A priority Critical patent/JPH06105668B2/en
Publication of JPS641215A publication Critical patent/JPS641215A/en
Publication of JPH011215A publication Critical patent/JPH011215A/en
Publication of JPH06105668B2 publication Critical patent/JPH06105668B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Magnetic Heads (AREA)
  • Thin Magnetic Films (AREA)

Abstract

PURPOSE: To uniformly form the thickness of a masking material at positions and to manufacture a magnetic thin film having high dimensional accuracy by employing a plating film by a plating method as the masking material for etching the film.
CONSTITUTION: A pattern of an organic resin film 7 is formed on a substrate 1, an upper magnetic thin film 3 is deposited by a sputtering method thereon, and a copper plating film 11 is deposited in thickness of 1.5W2 times as large as the thickness of the thin film 3 by a plating method. The film 11 is coated with a photoresist 12, and etched by an ion milling method to be patterned. When the photoresist is removed and with the film 11 as a masking material the thin film 3 is etched by an ion milling method, the patterning of the thin film 3 is completed. The film 11 used for the masking material is removed by dissolving it by wet etching with aqueous ammonium persulfate solution.
COPYRIGHT: (C)1989,JPO&Japio
JP15626087A 1987-06-23 1987-06-23 Method of manufacturing magnetic thin film Expired - Lifetime JPH06105668B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15626087A JPH06105668B2 (en) 1987-06-23 1987-06-23 Method of manufacturing magnetic thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15626087A JPH06105668B2 (en) 1987-06-23 1987-06-23 Method of manufacturing magnetic thin film

Publications (3)

Publication Number Publication Date
JPS641215A true JPS641215A (en) 1989-01-05
JPH011215A JPH011215A (en) 1989-01-05
JPH06105668B2 JPH06105668B2 (en) 1994-12-21

Family

ID=15623910

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15626087A Expired - Lifetime JPH06105668B2 (en) 1987-06-23 1987-06-23 Method of manufacturing magnetic thin film

Country Status (1)

Country Link
JP (1) JPH06105668B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02220712A (en) * 1989-02-22 1990-09-03 Okiyo Date Plate stock inserting apparatus for leveler in plate stock supply system for press machine
JP2002540548A (en) * 1999-03-30 2002-11-26 ビーコ・インストゥルーメンツ・インコーポレーション Reactive ion beam etching method and thin film head manufactured using the method
US7139153B2 (en) 2004-02-23 2006-11-21 Hitachi Global Storage Technologies Netherlands B.V. Magnetic pole tip for perpendicular magnetic recording

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02220712A (en) * 1989-02-22 1990-09-03 Okiyo Date Plate stock inserting apparatus for leveler in plate stock supply system for press machine
JP2002540548A (en) * 1999-03-30 2002-11-26 ビーコ・インストゥルーメンツ・インコーポレーション Reactive ion beam etching method and thin film head manufactured using the method
US7139153B2 (en) 2004-02-23 2006-11-21 Hitachi Global Storage Technologies Netherlands B.V. Magnetic pole tip for perpendicular magnetic recording

Also Published As

Publication number Publication date
JPH06105668B2 (en) 1994-12-21

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