JPS55142480A - Manufacture for planer type magnetic bubble element overlay - Google Patents
Manufacture for planer type magnetic bubble element overlayInfo
- Publication number
- JPS55142480A JPS55142480A JP4969179A JP4969179A JPS55142480A JP S55142480 A JPS55142480 A JP S55142480A JP 4969179 A JP4969179 A JP 4969179A JP 4969179 A JP4969179 A JP 4969179A JP S55142480 A JPS55142480 A JP S55142480A
- Authority
- JP
- Japan
- Prior art keywords
- sio
- protective film
- manufacture
- type magnetic
- magnetic bubble
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To manufacture the said overlay high in the reliability with less number of processes, by the lift-off method after evaporating the conductor metal on the entire protective film surface, after the conductor pattern location is formed on the SiO2 protective film on the wafer.
CONSTITUTION: SiO2 2 is formed as the protective film of the wafer 1. This SiO2 2 is etched with a given depth by means of reactive sputtering etching method by taking the organic resist on it as the mask to form the conductor pattern location 2a. Next, the entire surface of SiO2 is evaporated with Al-Cu 3 as the conductor metal, and SiO 4 is evaporated on the entire surface of Al-Cu 3. Next, Al-Cu 3 other than the location 2a is spray-ethced with an aqueous solution of hydrochloric acid, and the SiO 4 film attached on it is removed, then the surface of SiO 4 and SiO2 2 is plane without step. Further, after forming the permalloy film 5 on SiO 4 and SiO2 2, patterning is made with photo etching method and the SiO2 6 protective film is formed on it.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4969179A JPS599111B2 (en) | 1979-04-24 | 1979-04-24 | Manufacturing method of planar magnetic bubble element overlay |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP4969179A JPS599111B2 (en) | 1979-04-24 | 1979-04-24 | Manufacturing method of planar magnetic bubble element overlay |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS55142480A true JPS55142480A (en) | 1980-11-07 |
JPS599111B2 JPS599111B2 (en) | 1984-02-29 |
Family
ID=12838199
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP4969179A Expired JPS599111B2 (en) | 1979-04-24 | 1979-04-24 | Manufacturing method of planar magnetic bubble element overlay |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS599111B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074192A (en) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | Method for forming bubble memory |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0511286Y2 (en) * | 1986-07-14 | 1993-03-19 |
-
1979
- 1979-04-24 JP JP4969179A patent/JPS599111B2/en not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6074192A (en) * | 1983-09-30 | 1985-04-26 | Fujitsu Ltd | Method for forming bubble memory |
Also Published As
Publication number | Publication date |
---|---|
JPS599111B2 (en) | 1984-02-29 |
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