GB1475884A - substrate - Google Patents
substrateInfo
- Publication number
- GB1475884A GB1475884A GB5733173A GB5733173A GB1475884A GB 1475884 A GB1475884 A GB 1475884A GB 5733173 A GB5733173 A GB 5733173A GB 5733173 A GB5733173 A GB 5733173A GB 1475884 A GB1475884 A GB 1475884A
- Authority
- GB
- United Kingdom
- Prior art keywords
- layer
- permalloy
- masking layer
- deposited
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
- H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Thin Magnetic Films (AREA)
Abstract
1475884 Forming patterned metal coatings POST OFFICE 29 Nov 1974 [11 Dec 1973] 57331/73 Heading C7F In forming a pattern of permalloy (Fe-Ni alloy) as a magnetic garnet substrate 1, a support layer 2 of Al is deposited by evaporation upon which a masking layer 3 is formed, wherein the support layer 2 is etched through the masking layer 3 until it undercuts the masking layer 3 Fig. 1, when the permalloy is deposited on to the substrate 1 by evaporation Fig. 2. The masking layer 3 is of SiO 2 , deposited by sputtering, and is covered with photoresist emulsion, exposed and developed in the desired pattern, followed by etching of the exposed parts to give the layer 3 shown in the figures. After deposition of the permalloy 7, the remaining support layer 2 (together with masking layer 3 and the permalloy deposit 6) is removed by etching the layer 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5733173A GB1475884A (en) | 1974-11-29 | 1974-11-29 | substrate |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB5733173A GB1475884A (en) | 1974-11-29 | 1974-11-29 | substrate |
Publications (1)
Publication Number | Publication Date |
---|---|
GB1475884A true GB1475884A (en) | 1977-06-10 |
Family
ID=10478937
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB5733173A Expired GB1475884A (en) | 1974-11-29 | 1974-11-29 | substrate |
Country Status (1)
Country | Link |
---|---|
GB (1) | GB1475884A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0022580A1 (en) * | 1979-07-17 | 1981-01-21 | Western Electric Company, Incorporated | Advantageous fabrication technique for devices relying on magnetic properties |
GB2122646A (en) * | 1980-08-22 | 1984-01-18 | Gen Electric | Transfer lamination of vapor deposited foils method and product |
-
1974
- 1974-11-29 GB GB5733173A patent/GB1475884A/en not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0022580A1 (en) * | 1979-07-17 | 1981-01-21 | Western Electric Company, Incorporated | Advantageous fabrication technique for devices relying on magnetic properties |
GB2122646A (en) * | 1980-08-22 | 1984-01-18 | Gen Electric | Transfer lamination of vapor deposited foils method and product |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PS | Patent sealed | ||
746 | Register noted 'licences of right' (sect. 46/1977) | ||
PCNP | Patent ceased through non-payment of renewal fee |