GB1475884A - substrate - Google Patents

substrate

Info

Publication number
GB1475884A
GB1475884A GB5733173A GB5733173A GB1475884A GB 1475884 A GB1475884 A GB 1475884A GB 5733173 A GB5733173 A GB 5733173A GB 5733173 A GB5733173 A GB 5733173A GB 1475884 A GB1475884 A GB 1475884A
Authority
GB
United Kingdom
Prior art keywords
layer
permalloy
masking layer
deposited
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
GB5733173A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
POST OFFICE DEPOSITION OF A PA
Original Assignee
POST OFFICE DEPOSITION OF A PA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by POST OFFICE DEPOSITION OF A PA filed Critical POST OFFICE DEPOSITION OF A PA
Priority to GB5733173A priority Critical patent/GB1475884A/en
Publication of GB1475884A publication Critical patent/GB1475884A/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F41/00—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties
    • H01F41/14—Apparatus or processes specially adapted for manufacturing or assembling magnets, inductances or transformers; Apparatus or processes specially adapted for manufacturing materials characterised by their magnetic properties for applying magnetic films to substrates

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Thin Magnetic Films (AREA)

Abstract

1475884 Forming patterned metal coatings POST OFFICE 29 Nov 1974 [11 Dec 1973] 57331/73 Heading C7F In forming a pattern of permalloy (Fe-Ni alloy) as a magnetic garnet substrate 1, a support layer 2 of Al is deposited by evaporation upon which a masking layer 3 is formed, wherein the support layer 2 is etched through the masking layer 3 until it undercuts the masking layer 3 Fig. 1, when the permalloy is deposited on to the substrate 1 by evaporation Fig. 2. The masking layer 3 is of SiO 2 , deposited by sputtering, and is covered with photoresist emulsion, exposed and developed in the desired pattern, followed by etching of the exposed parts to give the layer 3 shown in the figures. After deposition of the permalloy 7, the remaining support layer 2 (together with masking layer 3 and the permalloy deposit 6) is removed by etching the layer 2.
GB5733173A 1974-11-29 1974-11-29 substrate Expired GB1475884A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
GB5733173A GB1475884A (en) 1974-11-29 1974-11-29 substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5733173A GB1475884A (en) 1974-11-29 1974-11-29 substrate

Publications (1)

Publication Number Publication Date
GB1475884A true GB1475884A (en) 1977-06-10

Family

ID=10478937

Family Applications (1)

Application Number Title Priority Date Filing Date
GB5733173A Expired GB1475884A (en) 1974-11-29 1974-11-29 substrate

Country Status (1)

Country Link
GB (1) GB1475884A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0022580A1 (en) * 1979-07-17 1981-01-21 Western Electric Company, Incorporated Advantageous fabrication technique for devices relying on magnetic properties
GB2122646A (en) * 1980-08-22 1984-01-18 Gen Electric Transfer lamination of vapor deposited foils method and product

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0022580A1 (en) * 1979-07-17 1981-01-21 Western Electric Company, Incorporated Advantageous fabrication technique for devices relying on magnetic properties
GB2122646A (en) * 1980-08-22 1984-01-18 Gen Electric Transfer lamination of vapor deposited foils method and product

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Legal Events

Date Code Title Description
PS Patent sealed
746 Register noted 'licences of right' (sect. 46/1977)
PCNP Patent ceased through non-payment of renewal fee