JPS60167199A - 半導体記憶装置の検査装置 - Google Patents
半導体記憶装置の検査装置Info
- Publication number
- JPS60167199A JPS60167199A JP59167341A JP16734184A JPS60167199A JP S60167199 A JPS60167199 A JP S60167199A JP 59167341 A JP59167341 A JP 59167341A JP 16734184 A JP16734184 A JP 16734184A JP S60167199 A JPS60167199 A JP S60167199A
- Authority
- JP
- Japan
- Prior art keywords
- memory cell
- signal
- acceptable
- unacceptable
- output
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 24
- 238000007689 inspection Methods 0.000 title abstract description 12
- 238000012360 testing method Methods 0.000 claims abstract description 40
- 238000003860 storage Methods 0.000 claims abstract description 24
- 230000007547 defect Effects 0.000 abstract description 24
- 230000002950 deficient Effects 0.000 abstract description 15
- 238000010586 diagram Methods 0.000 description 6
- 238000013461 design Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 4
- 238000012356 Product development Methods 0.000 description 2
- 230000000873 masking effect Effects 0.000 description 2
- 238000004904 shortening Methods 0.000 description 2
- 241001504505 Troglodytes troglodytes Species 0.000 description 1
- 241000981595 Zoysia japonica Species 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11C—STATIC STORES
- G11C29/00—Checking stores for correct operation ; Subsequent repair; Testing stores during standby or offline operation
- G11C29/56—External testing equipment for static stores, e.g. automatic test equipment [ATE]; Interfaces therefor
Landscapes
- Tests Of Electronic Circuits (AREA)
- Techniques For Improving Reliability Of Storages (AREA)
- For Increasing The Reliability Of Semiconductor Memories (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59167341A JPS60167199A (ja) | 1984-08-10 | 1984-08-10 | 半導体記憶装置の検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59167341A JPS60167199A (ja) | 1984-08-10 | 1984-08-10 | 半導体記憶装置の検査装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP51129911A Division JPS5816559B2 (ja) | 1976-10-27 | 1976-10-27 | 半導体記憶装置の検査装置および検査方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS60167199A true JPS60167199A (ja) | 1985-08-30 |
JPS6327797B2 JPS6327797B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-06-06 |
Family
ID=15847929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59167341A Granted JPS60167199A (ja) | 1984-08-10 | 1984-08-10 | 半導体記憶装置の検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS60167199A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5317573A (en) * | 1989-08-30 | 1994-05-31 | International Business Machines Corporation | Apparatus and method for real time data error capture and compression redundancy analysis |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5066124A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-10-12 | 1975-06-04 |
-
1984
- 1984-08-10 JP JP59167341A patent/JPS60167199A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5066124A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1973-10-12 | 1975-06-04 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5317573A (en) * | 1989-08-30 | 1994-05-31 | International Business Machines Corporation | Apparatus and method for real time data error capture and compression redundancy analysis |
Also Published As
Publication number | Publication date |
---|---|
JPS6327797B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1988-06-06 |