JPS6010747A - 自動チツプ付装置 - Google Patents

自動チツプ付装置

Info

Publication number
JPS6010747A
JPS6010747A JP11909083A JP11909083A JPS6010747A JP S6010747 A JPS6010747 A JP S6010747A JP 11909083 A JP11909083 A JP 11909083A JP 11909083 A JP11909083 A JP 11909083A JP S6010747 A JPS6010747 A JP S6010747A
Authority
JP
Japan
Prior art keywords
tray
chip
chips
magazine
trays
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11909083A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0354467B2 (OSRAM
Inventor
Naoki Sugao
管生　直樹
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP11909083A priority Critical patent/JPS6010747A/ja
Publication of JPS6010747A publication Critical patent/JPS6010747A/ja
Publication of JPH0354467B2 publication Critical patent/JPH0354467B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
    • H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Die Bonding (AREA)
JP11909083A 1983-06-30 1983-06-30 自動チツプ付装置 Granted JPS6010747A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11909083A JPS6010747A (ja) 1983-06-30 1983-06-30 自動チツプ付装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11909083A JPS6010747A (ja) 1983-06-30 1983-06-30 自動チツプ付装置

Publications (2)

Publication Number Publication Date
JPS6010747A true JPS6010747A (ja) 1985-01-19
JPH0354467B2 JPH0354467B2 (OSRAM) 1991-08-20

Family

ID=14752642

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11909083A Granted JPS6010747A (ja) 1983-06-30 1983-06-30 自動チツプ付装置

Country Status (1)

Country Link
JP (1) JPS6010747A (OSRAM)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100365543B1 (ko) * 2000-08-30 2002-12-26 동양반도체장비 주식회사 반도체패키지 제조 장비의 엘리베이터 장치
US6599077B2 (en) * 1999-08-25 2003-07-29 Maxtor Corporation Material delivery system for clean room-like environments
JP2010208647A (ja) * 2009-03-09 2010-09-24 Honda Motor Co Ltd 物品収納トレー及び物品収納トレーの搬送方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6599077B2 (en) * 1999-08-25 2003-07-29 Maxtor Corporation Material delivery system for clean room-like environments
KR100365543B1 (ko) * 2000-08-30 2002-12-26 동양반도체장비 주식회사 반도체패키지 제조 장비의 엘리베이터 장치
JP2010208647A (ja) * 2009-03-09 2010-09-24 Honda Motor Co Ltd 物品収納トレー及び物品収納トレーの搬送方法

Also Published As

Publication number Publication date
JPH0354467B2 (OSRAM) 1991-08-20

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