JPS5997458U - イオン電子線照射装置 - Google Patents

イオン電子線照射装置

Info

Publication number
JPS5997458U
JPS5997458U JP19135182U JP19135182U JPS5997458U JP S5997458 U JPS5997458 U JP S5997458U JP 19135182 U JP19135182 U JP 19135182U JP 19135182 U JP19135182 U JP 19135182U JP S5997458 U JPS5997458 U JP S5997458U
Authority
JP
Japan
Prior art keywords
beam irradiation
electron beam
ion
irradiation device
ion electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19135182U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0429439Y2 (OSRAM
Inventor
最上　明矩
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP19135182U priority Critical patent/JPS5997458U/ja
Publication of JPS5997458U publication Critical patent/JPS5997458U/ja
Application granted granted Critical
Publication of JPH0429439Y2 publication Critical patent/JPH0429439Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
  • Sampling And Sample Adjustment (AREA)
JP19135182U 1982-12-20 1982-12-20 イオン電子線照射装置 Granted JPS5997458U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19135182U JPS5997458U (ja) 1982-12-20 1982-12-20 イオン電子線照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19135182U JPS5997458U (ja) 1982-12-20 1982-12-20 イオン電子線照射装置

Publications (2)

Publication Number Publication Date
JPS5997458U true JPS5997458U (ja) 1984-07-02
JPH0429439Y2 JPH0429439Y2 (OSRAM) 1992-07-16

Family

ID=30412081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19135182U Granted JPS5997458U (ja) 1982-12-20 1982-12-20 イオン電子線照射装置

Country Status (1)

Country Link
JP (1) JPS5997458U (OSRAM)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515315A (en) * 1974-07-04 1976-01-17 Hiroshi Arima Rensetsutairuno seizohoho
JPS52104290A (en) * 1976-02-27 1977-09-01 Shimadzu Corp Composite analysis unit
JPS54117059U (OSRAM) * 1978-02-03 1979-08-16

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS515315A (en) * 1974-07-04 1976-01-17 Hiroshi Arima Rensetsutairuno seizohoho
JPS52104290A (en) * 1976-02-27 1977-09-01 Shimadzu Corp Composite analysis unit
JPS54117059U (OSRAM) * 1978-02-03 1979-08-16

Also Published As

Publication number Publication date
JPH0429439Y2 (OSRAM) 1992-07-16

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