JPS52104290A - Composite analysis unit - Google Patents

Composite analysis unit

Info

Publication number
JPS52104290A
JPS52104290A JP2124276A JP2124276A JPS52104290A JP S52104290 A JPS52104290 A JP S52104290A JP 2124276 A JP2124276 A JP 2124276A JP 2124276 A JP2124276 A JP 2124276A JP S52104290 A JPS52104290 A JP S52104290A
Authority
JP
Japan
Prior art keywords
analysis unit
composite analysis
composite
unit
allowing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2124276A
Other languages
Japanese (ja)
Other versions
JPS5947424B2 (en
Inventor
Masabumi Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP2124276A priority Critical patent/JPS5947424B2/en
Publication of JPS52104290A publication Critical patent/JPS52104290A/en
Publication of JPS5947424B2 publication Critical patent/JPS5947424B2/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/225—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material using electron or ion

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Electron Sources, Ion Sources (AREA)

Abstract

PURPOSE:To reduce the manual operations when making multiple analyses by allowing them to be made in one unit.
JP2124276A 1976-02-27 1976-02-27 Composite analysis device Expired JPS5947424B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2124276A JPS5947424B2 (en) 1976-02-27 1976-02-27 Composite analysis device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2124276A JPS5947424B2 (en) 1976-02-27 1976-02-27 Composite analysis device

Publications (2)

Publication Number Publication Date
JPS52104290A true JPS52104290A (en) 1977-09-01
JPS5947424B2 JPS5947424B2 (en) 1984-11-19

Family

ID=12049573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2124276A Expired JPS5947424B2 (en) 1976-02-27 1976-02-27 Composite analysis device

Country Status (1)

Country Link
JP (1) JPS5947424B2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968159A (en) * 1982-10-05 1984-04-18 Seiko Instr & Electronics Ltd Analyzer constituted by use of ion source
JPS5980019A (en) * 1982-10-30 1984-05-09 Matsushita Electric Works Ltd Timer with set mode error display
JPS5997458U (en) * 1982-12-20 1984-07-02 日本電子株式会社 Ion electron beam irradiation device
JPS613406A (en) * 1984-06-18 1986-01-09 Hitachi Ltd Evaluation method of radiant ray sensitivity of radiant ray sensitive composite and equipment thereof
JPS61165941A (en) * 1986-01-17 1986-07-26 Hitachi Ltd Device for irradiating charged particles
JPS62283640A (en) * 1986-05-31 1987-12-09 Toshiba Corp Method and apparatus for analyzing operation of semiconductor integrated circuit

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5968159A (en) * 1982-10-05 1984-04-18 Seiko Instr & Electronics Ltd Analyzer constituted by use of ion source
JPS5980019A (en) * 1982-10-30 1984-05-09 Matsushita Electric Works Ltd Timer with set mode error display
JPS5997458U (en) * 1982-12-20 1984-07-02 日本電子株式会社 Ion electron beam irradiation device
JPH0429439Y2 (en) * 1982-12-20 1992-07-16
JPS613406A (en) * 1984-06-18 1986-01-09 Hitachi Ltd Evaluation method of radiant ray sensitivity of radiant ray sensitive composite and equipment thereof
JPS61165941A (en) * 1986-01-17 1986-07-26 Hitachi Ltd Device for irradiating charged particles
JPH0235420B2 (en) * 1986-01-17 1990-08-10 Hitachi Ltd
JPS62283640A (en) * 1986-05-31 1987-12-09 Toshiba Corp Method and apparatus for analyzing operation of semiconductor integrated circuit

Also Published As

Publication number Publication date
JPS5947424B2 (en) 1984-11-19

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