JPS58151371A - 窒化珪素焼結体の製造法 - Google Patents
窒化珪素焼結体の製造法Info
- Publication number
- JPS58151371A JPS58151371A JP57030196A JP3019682A JPS58151371A JP S58151371 A JPS58151371 A JP S58151371A JP 57030196 A JP57030196 A JP 57030196A JP 3019682 A JP3019682 A JP 3019682A JP S58151371 A JPS58151371 A JP S58151371A
- Authority
- JP
- Japan
- Prior art keywords
- silicon nitride
- powder
- volume
- sintered body
- crystal structure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229910052581 Si3N4 Inorganic materials 0.000 title claims description 18
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 title claims description 18
- 238000004519 manufacturing process Methods 0.000 title claims description 4
- 239000000843 powder Substances 0.000 claims description 23
- 239000013078 crystal Substances 0.000 claims description 20
- 238000005245 sintering Methods 0.000 claims description 19
- 239000012299 nitrogen atmosphere Substances 0.000 claims description 9
- 239000006185 dispersion Substances 0.000 claims description 6
- 238000000034 method Methods 0.000 claims description 6
- 239000002994 raw material Substances 0.000 claims description 4
- 239000003795 chemical substances by application Substances 0.000 claims description 3
- 238000005728 strengthening Methods 0.000 claims description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 claims description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- 238000000354 decomposition reaction Methods 0.000 description 4
- 230000009466 transformation Effects 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000007731 hot pressing Methods 0.000 description 2
- 238000005121 nitriding Methods 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000011148 porous material Substances 0.000 description 2
- VXEGSRKPIUDPQT-UHFFFAOYSA-N 4-[4-(4-methoxyphenyl)piperazin-1-yl]aniline Chemical compound C1=CC(OC)=CC=C1N1CCN(C=2C=CC(N)=CC=2)CC1 VXEGSRKPIUDPQT-UHFFFAOYSA-N 0.000 description 1
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 229910010252 TiO3 Inorganic materials 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 239000003623 enhancer Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 238000001272 pressureless sintering Methods 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
- 239000005049 silicon tetrachloride Substances 0.000 description 1
- 239000011863 silicon-based powder Substances 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 239000006104 solid solution Substances 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 230000006641 stabilisation Effects 0.000 description 1
- 238000011105 stabilization Methods 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing effect Effects 0.000 description 1
- 230000004580 weight loss Effects 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57030196A JPS58151371A (ja) | 1982-02-25 | 1982-02-25 | 窒化珪素焼結体の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57030196A JPS58151371A (ja) | 1982-02-25 | 1982-02-25 | 窒化珪素焼結体の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58151371A true JPS58151371A (ja) | 1983-09-08 |
| JPH0250076B2 JPH0250076B2 (https=) | 1990-11-01 |
Family
ID=12296991
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57030196A Granted JPS58151371A (ja) | 1982-02-25 | 1982-02-25 | 窒化珪素焼結体の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58151371A (https=) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60131865A (ja) * | 1983-12-21 | 1985-07-13 | 株式会社東芝 | 窒化ケイ素セラミツクスの製造方法 |
| JPS6114173A (ja) * | 1984-06-27 | 1986-01-22 | エレクトロシユメルツヴエルク・ケンプテン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 窒化ケイ素と焼結添加剤よりなる多結晶焼結体およびその製造方法 |
| JPS6340711A (ja) * | 1986-08-06 | 1988-02-22 | Ngk Insulators Ltd | β型窒化珪素の製造法 |
| JPS6389459A (ja) * | 1986-10-03 | 1988-04-20 | 住友電気工業株式会社 | 窒化ケイ素焼結体の製造方法 |
| JPS63162574A (ja) * | 1986-12-24 | 1988-07-06 | 住友電気工業株式会社 | 切削工具用窒化ケイ素焼結体の製造方法 |
| JPS63235437A (ja) * | 1986-10-24 | 1988-09-30 | Ube Ind Ltd | β型窒化珪素ウイスカー成形体及びその製法 |
| US4880756A (en) * | 1987-09-02 | 1989-11-14 | Ngk Spark Plug Co., Ltd. | Silicon nitride sintered product |
| JPH02255573A (ja) * | 1989-03-29 | 1990-10-16 | Natl Inst For Res In Inorg Mater | 高靭性窒化珪素焼結体の製造法 |
| JPH03290370A (ja) * | 1990-04-09 | 1991-12-20 | Natl Inst For Res In Inorg Mater | 高靭性窒化けい素焼結体の製造法 |
| US5093290A (en) * | 1988-07-08 | 1992-03-03 | Nippon Tungsten Co., Ltd. | Silicon nitride type sintered bodies and method for producing the same |
| FR2669919A1 (fr) * | 1990-11-29 | 1992-06-05 | Bayer Ag | Materiau fritte a base de si3n4 et son procede de production. |
| US5158914A (en) * | 1990-09-14 | 1992-10-27 | Honda Giken Kogyo Kabushiki Kaisha | Method of heat-treating silicon nitride sintered body |
| US5178647A (en) * | 1983-07-29 | 1993-01-12 | Kabushiki Kaisha Toshiba | Wear-resistant member |
| JPH072571A (ja) * | 1991-09-25 | 1995-01-06 | Natl Inst For Res In Inorg Mater | 低温焼結窒化ケイ素質焼結体の製造方法 |
| US5401450A (en) * | 1991-12-20 | 1995-03-28 | Nissan Motor Co., Ltd | β-silicon nitride sintered body and method of producing same |
| JPH07166318A (ja) * | 1994-09-22 | 1995-06-27 | Toshiba Corp | 被覆パターン形成用マスク |
| WO2003084895A1 (fr) * | 2002-04-04 | 2003-10-16 | Kabushiki Kaisha Toshiba | Element anti-usure en nitrure de silicium et procede de fabrication correspondant |
| CN107245624A (zh) * | 2017-06-12 | 2017-10-13 | 长沙伟徽高科技新材料股份有限公司 | 一种五元固溶体及其制备方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2670221B2 (ja) * | 1993-01-22 | 1997-10-29 | 日本碍子株式会社 | 窒化珪素焼結体及びその製造方法 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53118409A (en) * | 1977-03-25 | 1978-10-16 | Tokyo Shibaura Electric Co | Method of manufacturing heat resistant material |
| JPS5527843A (en) * | 1978-08-16 | 1980-02-28 | Toshiba Corp | Production of silicon nitride ceramic powder material |
-
1982
- 1982-02-25 JP JP57030196A patent/JPS58151371A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS53118409A (en) * | 1977-03-25 | 1978-10-16 | Tokyo Shibaura Electric Co | Method of manufacturing heat resistant material |
| JPS5527843A (en) * | 1978-08-16 | 1980-02-28 | Toshiba Corp | Production of silicon nitride ceramic powder material |
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5178647A (en) * | 1983-07-29 | 1993-01-12 | Kabushiki Kaisha Toshiba | Wear-resistant member |
| JPS60131865A (ja) * | 1983-12-21 | 1985-07-13 | 株式会社東芝 | 窒化ケイ素セラミツクスの製造方法 |
| JPS6114173A (ja) * | 1984-06-27 | 1986-01-22 | エレクトロシユメルツヴエルク・ケンプテン・ゲゼルシヤフト・ミツト・ベシユレンクテル・ハフツング | 窒化ケイ素と焼結添加剤よりなる多結晶焼結体およびその製造方法 |
| JPS6340711A (ja) * | 1986-08-06 | 1988-02-22 | Ngk Insulators Ltd | β型窒化珪素の製造法 |
| JPS6389459A (ja) * | 1986-10-03 | 1988-04-20 | 住友電気工業株式会社 | 窒化ケイ素焼結体の製造方法 |
| JPS63235437A (ja) * | 1986-10-24 | 1988-09-30 | Ube Ind Ltd | β型窒化珪素ウイスカー成形体及びその製法 |
| JPS63162574A (ja) * | 1986-12-24 | 1988-07-06 | 住友電気工業株式会社 | 切削工具用窒化ケイ素焼結体の製造方法 |
| US4880756A (en) * | 1987-09-02 | 1989-11-14 | Ngk Spark Plug Co., Ltd. | Silicon nitride sintered product |
| US5093290A (en) * | 1988-07-08 | 1992-03-03 | Nippon Tungsten Co., Ltd. | Silicon nitride type sintered bodies and method for producing the same |
| JPH02255573A (ja) * | 1989-03-29 | 1990-10-16 | Natl Inst For Res In Inorg Mater | 高靭性窒化珪素焼結体の製造法 |
| JPH03290370A (ja) * | 1990-04-09 | 1991-12-20 | Natl Inst For Res In Inorg Mater | 高靭性窒化けい素焼結体の製造法 |
| US5158914A (en) * | 1990-09-14 | 1992-10-27 | Honda Giken Kogyo Kabushiki Kaisha | Method of heat-treating silicon nitride sintered body |
| FR2669919A1 (fr) * | 1990-11-29 | 1992-06-05 | Bayer Ag | Materiau fritte a base de si3n4 et son procede de production. |
| JPH072571A (ja) * | 1991-09-25 | 1995-01-06 | Natl Inst For Res In Inorg Mater | 低温焼結窒化ケイ素質焼結体の製造方法 |
| US5401450A (en) * | 1991-12-20 | 1995-03-28 | Nissan Motor Co., Ltd | β-silicon nitride sintered body and method of producing same |
| US5472919A (en) * | 1991-12-20 | 1995-12-05 | Nissan Motor Co., Ltd. | β-silicon nitride sintered body |
| JPH07166318A (ja) * | 1994-09-22 | 1995-06-27 | Toshiba Corp | 被覆パターン形成用マスク |
| WO2003084895A1 (fr) * | 2002-04-04 | 2003-10-16 | Kabushiki Kaisha Toshiba | Element anti-usure en nitrure de silicium et procede de fabrication correspondant |
| US7151066B2 (en) | 2002-04-04 | 2006-12-19 | Kabushiki Kaisha Toshiba | Silicon nitride anti-wear member and process for producing the same |
| CN107245624A (zh) * | 2017-06-12 | 2017-10-13 | 长沙伟徽高科技新材料股份有限公司 | 一种五元固溶体及其制备方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0250076B2 (https=) | 1990-11-01 |
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