JPS58135117A - ダイヤモンドの製造法 - Google Patents
ダイヤモンドの製造法Info
- Publication number
- JPS58135117A JPS58135117A JP57012966A JP1296682A JPS58135117A JP S58135117 A JPS58135117 A JP S58135117A JP 57012966 A JP57012966 A JP 57012966A JP 1296682 A JP1296682 A JP 1296682A JP S58135117 A JPS58135117 A JP S58135117A
- Authority
- JP
- Japan
- Prior art keywords
- diamond
- hydrogen
- gas
- plasma
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000010432 diamond Substances 0.000 title claims description 58
- 229910003460 diamond Inorganic materials 0.000 title claims description 52
- 238000004519 manufacturing process Methods 0.000 title claims description 10
- 239000007789 gas Substances 0.000 claims description 34
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 claims description 31
- 229910052739 hydrogen Inorganic materials 0.000 claims description 31
- 239000001257 hydrogen Substances 0.000 claims description 31
- 229930195733 hydrocarbon Natural products 0.000 claims description 20
- 150000002430 hydrocarbons Chemical class 0.000 claims description 20
- 239000004215 Carbon black (E152) Substances 0.000 claims description 9
- 230000007935 neutral effect Effects 0.000 claims description 5
- 239000000758 substrate Substances 0.000 description 24
- 238000006243 chemical reaction Methods 0.000 description 17
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 10
- 238000000034 method Methods 0.000 description 10
- 238000010438 heat treatment Methods 0.000 description 9
- 229910002804 graphite Inorganic materials 0.000 description 8
- 239000010439 graphite Substances 0.000 description 8
- UHOVQNZJYSORNB-UHFFFAOYSA-N Benzene Chemical compound C1=CC=CC=C1 UHOVQNZJYSORNB-UHFFFAOYSA-N 0.000 description 6
- 238000010894 electron beam technology Methods 0.000 description 6
- -1 hydrogen ions Chemical class 0.000 description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000010453 quartz Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- 239000013078 crystal Substances 0.000 description 4
- 238000002425 crystallisation Methods 0.000 description 4
- 230000008025 crystallization Effects 0.000 description 4
- 238000010574 gas phase reaction Methods 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 238000001556 precipitation Methods 0.000 description 4
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 150000002431 hydrogen Chemical class 0.000 description 3
- 230000006698 induction Effects 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000000843 powder Substances 0.000 description 3
- KAKZBPTYRLMSJV-UHFFFAOYSA-N Butadiene Chemical compound C=CC=C KAKZBPTYRLMSJV-UHFFFAOYSA-N 0.000 description 2
- RGSFGYAAUTVSQA-UHFFFAOYSA-N Cyclopentane Chemical compound C1CCCC1 RGSFGYAAUTVSQA-UHFFFAOYSA-N 0.000 description 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 2
- 239000005977 Ethylene Substances 0.000 description 2
- UFWIBTONFRDIAS-UHFFFAOYSA-N Naphthalene Chemical compound C1=CC=CC2=CC=CC=C21 UFWIBTONFRDIAS-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 238000005087 graphitization Methods 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 125000004435 hydrogen atom Chemical group [H]* 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 230000001737 promoting effect Effects 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000006104 solid solution Substances 0.000 description 2
- 238000003786 synthesis reaction Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- PMPVIKIVABFJJI-UHFFFAOYSA-N Cyclobutane Chemical compound C1CCC1 PMPVIKIVABFJJI-UHFFFAOYSA-N 0.000 description 1
- XDTMQSROBMDMFD-UHFFFAOYSA-N Cyclohexane Chemical compound C1CCCCC1 XDTMQSROBMDMFD-UHFFFAOYSA-N 0.000 description 1
- LVZWSLJZHVFIQJ-UHFFFAOYSA-N Cyclopropane Chemical compound C1CC1 LVZWSLJZHVFIQJ-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 1
- 244000171726 Scotch broom Species 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 150000004945 aromatic hydrocarbons Chemical class 0.000 description 1
- 125000000732 arylene group Chemical group 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- 238000009835 boiling Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- HWEQKSVYKBUIIK-UHFFFAOYSA-N cyclobuta-1,3-diene Chemical compound C1=CC=C1 HWEQKSVYKBUIIK-UHFFFAOYSA-N 0.000 description 1
- 239000012895 dilution Substances 0.000 description 1
- 238000010790 dilution Methods 0.000 description 1
- 239000012776 electronic material Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 150000002366 halogen compounds Chemical class 0.000 description 1
- DMEGYFMYUHOHGS-UHFFFAOYSA-N heptamethylene Natural products C1CCCCCC1 DMEGYFMYUHOHGS-UHFFFAOYSA-N 0.000 description 1
- 150000004678 hydrides Chemical class 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 150000002484 inorganic compounds Chemical class 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 150000002736 metal compounds Chemical class 0.000 description 1
- 238000002156 mixing Methods 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229920006395 saturated elastomer Polymers 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000002791 soaking Methods 0.000 description 1
- 239000007790 solid phase Substances 0.000 description 1
- 239000011029 spinel Substances 0.000 description 1
- 229910052596 spinel Inorganic materials 0.000 description 1
- 229910001256 stainless steel alloy Inorganic materials 0.000 description 1
- 229910052717 sulfur Inorganic materials 0.000 description 1
- 125000000383 tetramethylene group Chemical group [H]C([H])([*:1])C([H])([H])C([H])([H])C([H])([H])[*:2] 0.000 description 1
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 1
- 230000002747 voluntary effect Effects 0.000 description 1
- 239000008096 xylene Substances 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Carbon And Carbon Compounds (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57012966A JPS58135117A (ja) | 1982-01-29 | 1982-01-29 | ダイヤモンドの製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP57012966A JPS58135117A (ja) | 1982-01-29 | 1982-01-29 | ダイヤモンドの製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS58135117A true JPS58135117A (ja) | 1983-08-11 |
| JPS612632B2 JPS612632B2 (enExample) | 1986-01-27 |
Family
ID=11819980
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP57012966A Granted JPS58135117A (ja) | 1982-01-29 | 1982-01-29 | ダイヤモンドの製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58135117A (enExample) |
Cited By (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5935093A (ja) * | 1982-08-23 | 1984-02-25 | Sumitomo Electric Ind Ltd | ダイヤモンドの気相合成法 |
| JPS60124258A (ja) * | 1983-12-08 | 1985-07-03 | Mitsubishi Metal Corp | 表面被覆印字用ドツトピン |
| JPS60127298A (ja) * | 1983-12-09 | 1985-07-06 | Sumitomo Electric Ind Ltd | ダイヤモンドの気相合成法 |
| JPS60201879A (ja) * | 1984-03-26 | 1985-10-12 | Mitsubishi Metal Corp | 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石 |
| JPS60201878A (ja) * | 1984-03-26 | 1985-10-12 | Mitsubishi Metal Corp | 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石 |
| JPS60201877A (ja) * | 1984-03-28 | 1985-10-12 | Mitsubishi Metal Corp | 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石 |
| JPS60204695A (ja) * | 1984-03-28 | 1985-10-16 | Mitsubishi Metal Corp | 人工ダイヤモンド皮膜の析出形成方法 |
| JPS60221395A (ja) * | 1984-04-19 | 1985-11-06 | Yoshio Imai | ダイヤモンド薄膜の製造方法 |
| JPS6136199A (ja) * | 1984-07-25 | 1986-02-20 | Sumitomo Electric Ind Ltd | ダイヤモンド被膜を有する宝石 |
| JPS61101493A (ja) * | 1984-10-23 | 1986-05-20 | ジヨ−ジ ガ−ゲリ− マ−クル | 立方体炭素 |
| JPS61158899A (ja) * | 1985-07-31 | 1986-07-18 | Kyocera Corp | ダイヤモンド膜の製法 |
| JPS61183198A (ja) * | 1984-12-29 | 1986-08-15 | Kyocera Corp | ダイヤモンド膜の製法 |
| JPS6270295A (ja) * | 1985-09-24 | 1987-03-31 | Sumitomo Electric Ind Ltd | ｎ型半導体ダイヤモンド膜の製造法 |
| JPS62158195A (ja) * | 1985-12-27 | 1987-07-14 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
| US4734339A (en) * | 1984-06-27 | 1988-03-29 | Santrade Limited | Body with superhard coating |
| US4816286A (en) * | 1985-11-25 | 1989-03-28 | Showa Denko Kabushiki Kaisha | Process for synthesis of diamond by CVD |
| JPH01501142A (ja) * | 1986-10-15 | 1989-04-20 | ヒユーズ・エアクラフト・カンパニー | ダイヤモンド層の蒸着方法 |
| US4869924A (en) * | 1987-09-01 | 1989-09-26 | Idemitsu Petrochemical Company Limited | Method for synthesis of diamond and apparatus therefor |
| US4985227A (en) * | 1987-04-22 | 1991-01-15 | Indemitsu Petrochemical Co., Ltd. | Method for synthesis or diamond |
| US5015528A (en) * | 1987-03-30 | 1991-05-14 | Crystallume | Fluidized bed diamond particle growth |
| US5066515A (en) * | 1989-11-21 | 1991-11-19 | Mitsubishi Materials Corporation | Artificial diamond forming method |
| US5110579A (en) * | 1989-09-14 | 1992-05-05 | General Electric Company | Transparent diamond films and method for making |
| JPH04318369A (ja) * | 1991-04-17 | 1992-11-09 | Akai Electric Co Ltd | カセット装着装置 |
| US5329208A (en) * | 1991-06-05 | 1994-07-12 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device and method for producing the same |
| US5372799A (en) * | 1988-10-20 | 1994-12-13 | Sumitomo Electric Industries, Ltd. | Process for the synthesis of granular diamond |
| US5426340A (en) * | 1993-01-29 | 1995-06-20 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device and method of manufacturing the same |
| US5446329A (en) * | 1992-09-14 | 1995-08-29 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave element |
| EP0691413A2 (en) | 1993-04-06 | 1996-01-10 | Sumitomo Electric Industries, Ltd. | Diamond reinforced composite material and method of preparing the same |
| US5672382A (en) * | 1985-12-24 | 1997-09-30 | Sumitomo Electric Industries, Ltd. | Composite powder particle, composite body and method of preparation |
| US5677372A (en) * | 1993-04-06 | 1997-10-14 | Sumitomo Electric Industries, Ltd. | Diamond reinforced composite material |
| US5704976A (en) * | 1990-07-06 | 1998-01-06 | The United States Of America As Represented By The Secretary Of The Navy | High temperature, high rate, epitaxial synthesis of diamond in a laminar plasma |
| US5783335A (en) * | 1992-04-07 | 1998-07-21 | The Regents Of The University Of California, Office Of Technology Transfer | Fluidized bed deposition of diamond |
| JP2011162877A (ja) * | 2010-02-08 | 2011-08-25 | Sungkyunkwan Univ Foundation For Corporate Collaboration | グラフィンロールトロールコーティング装置及びこれを用いたグラフィンロールトロールコーティング方法 |
-
1982
- 1982-01-29 JP JP57012966A patent/JPS58135117A/ja active Granted
Cited By (35)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5935093A (ja) * | 1982-08-23 | 1984-02-25 | Sumitomo Electric Ind Ltd | ダイヤモンドの気相合成法 |
| JPS60124258A (ja) * | 1983-12-08 | 1985-07-03 | Mitsubishi Metal Corp | 表面被覆印字用ドツトピン |
| JPS60127298A (ja) * | 1983-12-09 | 1985-07-06 | Sumitomo Electric Ind Ltd | ダイヤモンドの気相合成法 |
| JPS60201879A (ja) * | 1984-03-26 | 1985-10-12 | Mitsubishi Metal Corp | 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石 |
| JPS60201878A (ja) * | 1984-03-26 | 1985-10-12 | Mitsubishi Metal Corp | 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石 |
| JPS60201877A (ja) * | 1984-03-28 | 1985-10-12 | Mitsubishi Metal Corp | 析出生成人工ダイヤモンド粒で構成されたダイヤモンド研磨砥石 |
| JPS60204695A (ja) * | 1984-03-28 | 1985-10-16 | Mitsubishi Metal Corp | 人工ダイヤモンド皮膜の析出形成方法 |
| JPS60221395A (ja) * | 1984-04-19 | 1985-11-06 | Yoshio Imai | ダイヤモンド薄膜の製造方法 |
| US4734339A (en) * | 1984-06-27 | 1988-03-29 | Santrade Limited | Body with superhard coating |
| JPS6136199A (ja) * | 1984-07-25 | 1986-02-20 | Sumitomo Electric Ind Ltd | ダイヤモンド被膜を有する宝石 |
| JPS61101493A (ja) * | 1984-10-23 | 1986-05-20 | ジヨ−ジ ガ−ゲリ− マ−クル | 立方体炭素 |
| JPS61183198A (ja) * | 1984-12-29 | 1986-08-15 | Kyocera Corp | ダイヤモンド膜の製法 |
| JPS61158899A (ja) * | 1985-07-31 | 1986-07-18 | Kyocera Corp | ダイヤモンド膜の製法 |
| JPS6270295A (ja) * | 1985-09-24 | 1987-03-31 | Sumitomo Electric Ind Ltd | ｎ型半導体ダイヤモンド膜の製造法 |
| US4816286A (en) * | 1985-11-25 | 1989-03-28 | Showa Denko Kabushiki Kaisha | Process for synthesis of diamond by CVD |
| US5672382A (en) * | 1985-12-24 | 1997-09-30 | Sumitomo Electric Industries, Ltd. | Composite powder particle, composite body and method of preparation |
| JPS62158195A (ja) * | 1985-12-27 | 1987-07-14 | Natl Inst For Res In Inorg Mater | ダイヤモンドの合成法 |
| JPH01501142A (ja) * | 1986-10-15 | 1989-04-20 | ヒユーズ・エアクラフト・カンパニー | ダイヤモンド層の蒸着方法 |
| US5015528A (en) * | 1987-03-30 | 1991-05-14 | Crystallume | Fluidized bed diamond particle growth |
| US4985227A (en) * | 1987-04-22 | 1991-01-15 | Indemitsu Petrochemical Co., Ltd. | Method for synthesis or diamond |
| US4984534A (en) * | 1987-04-22 | 1991-01-15 | Idemitsu Petrochemical Co., Ltd. | Method for synthesis of diamond |
| US4869924A (en) * | 1987-09-01 | 1989-09-26 | Idemitsu Petrochemical Company Limited | Method for synthesis of diamond and apparatus therefor |
| US5372799A (en) * | 1988-10-20 | 1994-12-13 | Sumitomo Electric Industries, Ltd. | Process for the synthesis of granular diamond |
| US5110579A (en) * | 1989-09-14 | 1992-05-05 | General Electric Company | Transparent diamond films and method for making |
| US5066515A (en) * | 1989-11-21 | 1991-11-19 | Mitsubishi Materials Corporation | Artificial diamond forming method |
| US5704976A (en) * | 1990-07-06 | 1998-01-06 | The United States Of America As Represented By The Secretary Of The Navy | High temperature, high rate, epitaxial synthesis of diamond in a laminar plasma |
| JPH04318369A (ja) * | 1991-04-17 | 1992-11-09 | Akai Electric Co Ltd | カセット装着装置 |
| US5329208A (en) * | 1991-06-05 | 1994-07-12 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device and method for producing the same |
| US5355568A (en) * | 1991-06-05 | 1994-10-18 | Sumitomo Electric Industries, Ltd. | Method of making a surface acoustic wave device |
| US5783335A (en) * | 1992-04-07 | 1998-07-21 | The Regents Of The University Of California, Office Of Technology Transfer | Fluidized bed deposition of diamond |
| US5446329A (en) * | 1992-09-14 | 1995-08-29 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave element |
| US5426340A (en) * | 1993-01-29 | 1995-06-20 | Sumitomo Electric Industries, Ltd. | Surface acoustic wave device and method of manufacturing the same |
| EP0691413A2 (en) | 1993-04-06 | 1996-01-10 | Sumitomo Electric Industries, Ltd. | Diamond reinforced composite material and method of preparing the same |
| US5677372A (en) * | 1993-04-06 | 1997-10-14 | Sumitomo Electric Industries, Ltd. | Diamond reinforced composite material |
| JP2011162877A (ja) * | 2010-02-08 | 2011-08-25 | Sungkyunkwan Univ Foundation For Corporate Collaboration | グラフィンロールトロールコーティング装置及びこれを用いたグラフィンロールトロールコーティング方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS612632B2 (enExample) | 1986-01-27 |
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