JPS577153A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS577153A
JPS577153A JP8117480A JP8117480A JPS577153A JP S577153 A JPS577153 A JP S577153A JP 8117480 A JP8117480 A JP 8117480A JP 8117480 A JP8117480 A JP 8117480A JP S577153 A JPS577153 A JP S577153A
Authority
JP
Japan
Prior art keywords
oxide film
layer
type
poly
wiring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8117480A
Other languages
English (en)
Inventor
Katsuhiko Suzuki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP8117480A priority Critical patent/JPS577153A/ja
Publication of JPS577153A publication Critical patent/JPS577153A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H10D84/0163—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs the components including enhancement-mode IGFETs and depletion-mode IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe

Landscapes

  • Metal-Oxide And Bipolar Metal-Oxide Semiconductor Integrated Circuits (AREA)
JP8117480A 1980-06-16 1980-06-16 Preparation of semiconductor device Pending JPS577153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8117480A JPS577153A (en) 1980-06-16 1980-06-16 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8117480A JPS577153A (en) 1980-06-16 1980-06-16 Preparation of semiconductor device

Publications (1)

Publication Number Publication Date
JPS577153A true JPS577153A (en) 1982-01-14

Family

ID=13739093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8117480A Pending JPS577153A (en) 1980-06-16 1980-06-16 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS577153A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983003923A1 (en) * 1982-04-23 1983-11-10 Western Electric Company, Inc. Semiconductor integrated circuit structures having insulated conductors
US4737471A (en) * 1985-06-19 1988-04-12 Fujitsu Limited Method for fabricating an insulated-gate FET having a narrow channel width
US4985373A (en) * 1982-04-23 1991-01-15 At&T Bell Laboratories Multiple insulating layer for two-level interconnected metallization in semiconductor integrated circuit structures

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1983003923A1 (en) * 1982-04-23 1983-11-10 Western Electric Company, Inc. Semiconductor integrated circuit structures having insulated conductors
US4985373A (en) * 1982-04-23 1991-01-15 At&T Bell Laboratories Multiple insulating layer for two-level interconnected metallization in semiconductor integrated circuit structures
US4737471A (en) * 1985-06-19 1988-04-12 Fujitsu Limited Method for fabricating an insulated-gate FET having a narrow channel width

Similar Documents

Publication Publication Date Title
US4295897A (en) Method of making CMOS integrated circuit device
JPS56134757A (en) Complementary type mos semiconductor device and its manufacture
JPS5529116A (en) Manufacture of complementary misic
KR20000037634A (ko) 반도체 소자의 제조 방법
GB1581498A (en) Integrated circuits
JPS5688354A (en) Semiconductor integrated circuit device
JPS5736842A (en) Semiconductor integrated circuit device
JPS5650535A (en) Manufacture of semiconductor device
JPS5717164A (en) Manufacture of complementary mos semiconductor device
JPS577153A (en) Preparation of semiconductor device
JPS6484659A (en) Manufacture of semiconductor device
JPS577154A (en) Preparation of semiconductor device
JPS56125875A (en) Semiconductor integrated circuit device
JPS5513953A (en) Complementary integrated circuit
JPS5783059A (en) Manufacture of mos type semiconductor device
JPS5483778A (en) Mos semiconductor device and its manufacture
JPS567482A (en) Manufacturing of semiconductor device
JPS5538019A (en) Manufacturing of semiconductor device
JPS5773974A (en) Manufacture of most type semiconductor device
JPS5780733A (en) Manufacture of semiconductor device
JPS55105332A (en) Manufacture of semiconductor device
JPS57107068A (en) Complementary mis semiconductor device
JPS56150860A (en) Manufacture of semiconductor memory device
JPS57106150A (en) Manufacture of semiconductor device
JPS5789259A (en) Semiconductor device