JPS5680168A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS5680168A
JPS5680168A JP15778379A JP15778379A JPS5680168A JP S5680168 A JPS5680168 A JP S5680168A JP 15778379 A JP15778379 A JP 15778379A JP 15778379 A JP15778379 A JP 15778379A JP S5680168 A JPS5680168 A JP S5680168A
Authority
JP
Japan
Prior art keywords
film
metal
melting point
high melting
mo2n
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15778379A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6159671B2 (enrdf_load_stackoverflow
Inventor
Hiroshi Tokunaga
Nobuo Toyokura
Shinichi Inoue
Hajime Ishikawa
Toru Shinoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP15778379A priority Critical patent/JPS5680168A/ja
Publication of JPS5680168A publication Critical patent/JPS5680168A/ja
Publication of JPS6159671B2 publication Critical patent/JPS6159671B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
JP15778379A 1979-12-05 1979-12-05 Manufacture of semiconductor device Granted JPS5680168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15778379A JPS5680168A (en) 1979-12-05 1979-12-05 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15778379A JPS5680168A (en) 1979-12-05 1979-12-05 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS5680168A true JPS5680168A (en) 1981-07-01
JPS6159671B2 JPS6159671B2 (enrdf_load_stackoverflow) 1986-12-17

Family

ID=15657194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15778379A Granted JPS5680168A (en) 1979-12-05 1979-12-05 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS5680168A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPS6159671B2 (enrdf_load_stackoverflow) 1986-12-17

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