JPS564238A - Forming of pattern - Google Patents
Forming of patternInfo
- Publication number
- JPS564238A JPS564238A JP7927279A JP7927279A JPS564238A JP S564238 A JPS564238 A JP S564238A JP 7927279 A JP7927279 A JP 7927279A JP 7927279 A JP7927279 A JP 7927279A JP S564238 A JPS564238 A JP S564238A
- Authority
- JP
- Japan
- Prior art keywords
- film
- etched
- thin
- resist
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000010408 film Substances 0.000 abstract 7
- 239000010409 thin film Substances 0.000 abstract 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 238000010894 electron beam technology Methods 0.000 abstract 2
- 238000005530 etching Methods 0.000 abstract 2
- 238000010884 ion-beam technique Methods 0.000 abstract 2
- 239000000126 substance Substances 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 238000011109 contamination Methods 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 150000002500 ions Chemical class 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 238000000992 sputter etching Methods 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
- Drying Of Semiconductors (AREA)
Abstract
PURPOSE:To prevent a thin film to be etched from being contaminated by external substances and improve etching resistance property remarkably by interposing the thin film to be etched between etching-resistive thin films. CONSTITUTION:An electron beam resist 7, a thin Ti film 6 and a resist 2 are overlapped with a thin film to be etched 3 of Nb or the like on an Si substrate 4. Exposure to light is performed to pattern the resist. After the Ti film 6 is etched by ions, the electron beam resist 7 and the Nb film 3 are etched by an Ar ion beam. The Ti film 6 shows high etching resistance to an Ar ion beam of 1keV and 1mA/ cm<2>, for example, so that a fine pattern can be made in the Nb film 3. According to this method, a fine pattern can be made in a thin metal layer, an SiO2 film or an Si3N4 film by ion etching and these thin films do not suffer from thermal strain and contamination from other places or substances.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7927279A JPS564238A (en) | 1979-06-23 | 1979-06-23 | Forming of pattern |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7927279A JPS564238A (en) | 1979-06-23 | 1979-06-23 | Forming of pattern |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS564238A true JPS564238A (en) | 1981-01-17 |
Family
ID=13685220
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7927279A Pending JPS564238A (en) | 1979-06-23 | 1979-06-23 | Forming of pattern |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS564238A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61191034A (en) * | 1985-02-20 | 1986-08-25 | Fujitsu Ltd | Formation of metallic pattern |
JPS63166231A (en) * | 1986-12-27 | 1988-07-09 | Hoya Corp | Manufacture of photo mask |
JPS63202396A (en) * | 1987-02-18 | 1988-08-22 | Ezaki Glyco Kk | Production of oligosaccharides having n-acetylglucosamine, glucosamine, mannose or allose at terminal |
US4792534A (en) * | 1985-12-25 | 1988-12-20 | Kabushiki Kaisha Toshiba | Method of manufacturing a semiconductor device involving sidewall spacer formation |
-
1979
- 1979-06-23 JP JP7927279A patent/JPS564238A/en active Pending
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61191034A (en) * | 1985-02-20 | 1986-08-25 | Fujitsu Ltd | Formation of metallic pattern |
US4792534A (en) * | 1985-12-25 | 1988-12-20 | Kabushiki Kaisha Toshiba | Method of manufacturing a semiconductor device involving sidewall spacer formation |
JPS63166231A (en) * | 1986-12-27 | 1988-07-09 | Hoya Corp | Manufacture of photo mask |
JPS63202396A (en) * | 1987-02-18 | 1988-08-22 | Ezaki Glyco Kk | Production of oligosaccharides having n-acetylglucosamine, glucosamine, mannose or allose at terminal |
JPH062072B2 (en) * | 1987-02-18 | 1994-01-12 | 江崎グリコ株式会社 | Process for producing oligosaccharides containing N-acetylglucosamine, glucosamine, mannose or allose at the end |
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