JPS56165255A - Image indicating method for transmission scan electron microscope - Google Patents

Image indicating method for transmission scan electron microscope

Info

Publication number
JPS56165255A
JPS56165255A JP6896980A JP6896980A JPS56165255A JP S56165255 A JPS56165255 A JP S56165255A JP 6896980 A JP6896980 A JP 6896980A JP 6896980 A JP6896980 A JP 6896980A JP S56165255 A JPS56165255 A JP S56165255A
Authority
JP
Japan
Prior art keywords
specimen
high frequency
electron beam
diaphragm
electron microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6896980A
Other languages
English (en)
Other versions
JPS6127856B2 (ja
Inventor
Takashi Matsuzaka
Hideo Todokoro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP6896980A priority Critical patent/JPS56165255A/ja
Priority to US06/266,290 priority patent/US4382182A/en
Priority to DE8181104050T priority patent/DE3160648D1/de
Priority to EP81104050A priority patent/EP0040855B1/en
Publication of JPS56165255A publication Critical patent/JPS56165255A/ja
Publication of JPS6127856B2 publication Critical patent/JPS6127856B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP6896980A 1980-05-26 1980-05-26 Image indicating method for transmission scan electron microscope Granted JPS56165255A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP6896980A JPS56165255A (en) 1980-05-26 1980-05-26 Image indicating method for transmission scan electron microscope
US06/266,290 US4382182A (en) 1980-05-26 1981-05-22 Method of displaying an image of phase contrast in a scanning transmission electron microscope
DE8181104050T DE3160648D1 (en) 1980-05-26 1981-05-26 A method of displaying an image of phase contrast in a scanning transmission electron microscope
EP81104050A EP0040855B1 (en) 1980-05-26 1981-05-26 A method of displaying an image of phase contrast in a scanning transmission electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6896980A JPS56165255A (en) 1980-05-26 1980-05-26 Image indicating method for transmission scan electron microscope

Publications (2)

Publication Number Publication Date
JPS56165255A true JPS56165255A (en) 1981-12-18
JPS6127856B2 JPS6127856B2 (ja) 1986-06-27

Family

ID=13389005

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6896980A Granted JPS56165255A (en) 1980-05-26 1980-05-26 Image indicating method for transmission scan electron microscope

Country Status (4)

Country Link
US (1) US4382182A (ja)
EP (1) EP0040855B1 (ja)
JP (1) JPS56165255A (ja)
DE (1) DE3160648D1 (ja)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4434399A (en) * 1982-05-14 1984-02-28 The University Of Rochester Electron-optical wide band signal measurement system
JP2563134B2 (ja) * 1989-01-25 1996-12-11 日本電子株式会社 走査透過型位相差電子顕微鏡
US4975578A (en) * 1989-04-17 1990-12-04 The Research Foundation Of State University Of Ny Method and apparatus for determining distribution of mass density
DE69128104T2 (de) * 1990-05-18 1998-04-09 Hitachi Ltd Elektronenmikroskop, Probenstellglied für ein Elektronenmikroskop und Verfahren zum Beobachten von mikroskopischen Bildern
JPH06181045A (ja) * 1992-10-13 1994-06-28 Hitachi Ltd 像観察方法及び透過電子顕微鏡装置
JP3441855B2 (ja) * 1995-08-25 2003-09-02 科学技術振興事業団 荷電粒子顕微鏡の観察装置
US8299432B2 (en) * 2008-11-04 2012-10-30 Fei Company Scanning transmission electron microscope using gas amplification
DE102011052924A1 (de) * 2011-08-23 2013-02-28 Universität Regensburg Vorrichtung und Verfahren zur Messung der Strahlablenkung mittels Frequenzanalyse
US11127562B1 (en) * 2020-08-05 2021-09-21 Fei Company System and method for RF pulsed electron beam based STEM
US20220208510A1 (en) * 2020-12-30 2022-06-30 Fei Company Stroboscopic illumination synchronized electron detection and imaging

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
US4038543A (en) * 1975-07-08 1977-07-26 Siemens Aktiengesellschaft Scanning transmission electron microscope including an improved image detector
DE2535510C2 (de) * 1975-08-06 1977-09-08 Siemens AG, 1000 Berlin und 8000 München Elektronenstrahl-Rastergerät zur Strukturanalyse von Präparaten
DE2652273C2 (de) * 1976-11-12 1978-11-02 Siemens Ag, 1000 Berlin Und 8000 Muenchen Verfahren zur bildlichen Darstellung eines Beugungsbildes bei einem Durchstrahlungs-Raster-Korpuskularstrahlmikroskop
NL7804038A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop.
NL7804037A (nl) * 1978-04-17 1979-10-19 Philips Nv Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.

Also Published As

Publication number Publication date
EP0040855A1 (en) 1981-12-02
JPS6127856B2 (ja) 1986-06-27
US4382182A (en) 1983-05-03
DE3160648D1 (en) 1983-08-25
EP0040855B1 (en) 1983-07-20

Similar Documents

Publication Publication Date Title
JPS56165255A (en) Image indicating method for transmission scan electron microscope
JPS5788659A (en) Electron ray device
US3184679A (en) Multi-phase signal processor for light line optical correlator
JPS57145259A (en) Scanning type electron microscope and its similar device
JPS5780649A (en) Electron ray energy analyzer
US4674333A (en) Multi-color displaying ultrasonic microscope
JPS54138467A (en) Scanning type electron microscope or resembling apparatus
JPS5427354A (en) Scan-type electronic microscope
JPS54133872A (en) Electron-beam detector
JPS55151757A (en) Image display for scanning type transmission electron microscope
JPS5635361A (en) Scanning electron microscope
JPS5780648A (en) Scanning image monitor
SU668026A1 (ru) Способ создани отметок на мишени передающей телевизионной трубки
KR830002861Y1 (ko) 주사전자 현미경 및 그의유사장치의 주사상 관찰장치
JPS55144577A (en) Energy analyzer for electron ray
JPS5472953A (en) Scanning method of scanning electron microscope
JPS5760650A (en) Strobe electron microscope
JPS57143251A (en) Electron beam apparatus
JPS5923444A (ja) 走査型反射電子回折顕微装置
JPS5671266A (en) Scanning electron microscope
JPS57187852A (en) Observation method of magnetic sector construction using electron microscope
JPS54100661A (en) Focusing unit of electron-beam device
JPS57189444A (en) Scale display method and scale indicator in scanning type electron microscope and similar device
JPS5765659A (en) Electron microscope
JPS577058A (en) Focus monitoring method for scan electron microscope