NL7804037A - Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming. - Google Patents

Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.

Info

Publication number
NL7804037A
NL7804037A NL7804037A NL7804037A NL7804037A NL 7804037 A NL7804037 A NL 7804037A NL 7804037 A NL7804037 A NL 7804037A NL 7804037 A NL7804037 A NL 7804037A NL 7804037 A NL7804037 A NL 7804037A
Authority
NL
Netherlands
Prior art keywords
microskop
electronic
phase image
undifferentiated
undifferentiated phase
Prior art date
Application number
NL7804037A
Other languages
English (en)
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Priority to NL7804037A priority Critical patent/NL7804037A/nl
Priority to GB7912904A priority patent/GB2019691B/en
Priority to DE19792915204 priority patent/DE2915204A1/de
Priority to JP4655279A priority patent/JPS54140455A/ja
Priority to FR7909631A priority patent/FR2423860A1/fr
Publication of NL7804037A publication Critical patent/NL7804037A/nl

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Image Processing (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
NL7804037A 1978-04-17 1978-04-17 Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming. NL7804037A (nl)

Priority Applications (5)

Application Number Priority Date Filing Date Title
NL7804037A NL7804037A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.
GB7912904A GB2019691B (en) 1978-04-17 1979-04-12 Scanning electron microscope with non-differentiated phaseimage formation
DE19792915204 DE2915204A1 (de) 1978-04-17 1979-04-14 Elektronenmikroskop mit undifferenzierter phasenbilderzeugung
JP4655279A JPS54140455A (en) 1978-04-17 1979-04-16 Electron microscope
FR7909631A FR2423860A1 (fr) 1978-04-17 1979-04-17 Microscope electronique pour la formation d'une image de phase qui n'est pas deduite d'images de difference

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804037A NL7804037A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.

Publications (1)

Publication Number Publication Date
NL7804037A true NL7804037A (nl) 1979-10-19

Family

ID=19830664

Family Applications (1)

Application Number Title Priority Date Filing Date
NL7804037A NL7804037A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.

Country Status (5)

Country Link
JP (1) JPS54140455A (nl)
DE (1) DE2915204A1 (nl)
FR (1) FR2423860A1 (nl)
GB (1) GB2019691B (nl)
NL (1) NL7804037A (nl)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165255A (en) * 1980-05-26 1981-12-18 Hitachi Ltd Image indicating method for transmission scan electron microscope
GB8415709D0 (en) * 1984-06-20 1984-07-25 Dubilier Scient Ltd Scanning microscope
NL8402340A (nl) * 1984-07-25 1986-02-17 Philips Nv Microscoop voor niet-gedifferentieerde fase-beeldvorming.
DE3610165A1 (de) * 1985-03-27 1986-10-02 Olympus Optical Co., Ltd., Tokio/Tokyo Optisches abtastmikroskop
GB8509493D0 (en) * 1985-04-12 1985-05-15 Plessey Co Plc Scanning microscopes
JP2567736B2 (ja) * 1990-11-30 1996-12-25 理化学研究所 イオン散乱分析装置
DE10331137B4 (de) * 2003-07-09 2008-04-30 Carl Zeiss Nts Gmbh Detektorsystem für ein Rasterelektronenmikroskop und Rasterelektronenmikroskop mit einem entsprechenden Detektorsystem
EP2194565A1 (en) 2008-12-03 2010-06-09 FEI Company Dark field detector for use in a charged-particle optical apparatus
EP2911180A1 (en) 2014-02-24 2015-08-26 FEI Company Method of examining a sample in a charged-particle microscope

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
FR2220871B1 (nl) * 1973-07-27 1978-01-20 Jeol Ltd
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
FR2300414A2 (fr) * 1975-02-07 1976-09-03 Cgr Mev Dispositif pour le controle de la p

Also Published As

Publication number Publication date
DE2915204A1 (de) 1979-10-25
GB2019691A (en) 1979-10-31
FR2423860A1 (fr) 1979-11-16
GB2019691B (en) 1982-08-04
FR2423860B1 (nl) 1985-01-18
JPS54140455A (en) 1979-10-31

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Legal Events

Date Code Title Description
A1B A search report has been drawn up
BV The patent application has lapsed