FR2423860A1 - Microscope electronique pour la formation d'une image de phase qui n'est pas deduite d'images de difference - Google Patents

Microscope electronique pour la formation d'une image de phase qui n'est pas deduite d'images de difference

Info

Publication number
FR2423860A1
FR2423860A1 FR7909631A FR7909631A FR2423860A1 FR 2423860 A1 FR2423860 A1 FR 2423860A1 FR 7909631 A FR7909631 A FR 7909631A FR 7909631 A FR7909631 A FR 7909631A FR 2423860 A1 FR2423860 A1 FR 2423860A1
Authority
FR
France
Prior art keywords
deducted
forming
phase image
difference images
electronic microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7909631A
Other languages
English (en)
Other versions
FR2423860B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Koninklijke Philips NV
Original Assignee
Philips Gloeilampenfabrieken NV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Gloeilampenfabrieken NV filed Critical Philips Gloeilampenfabrieken NV
Publication of FR2423860A1 publication Critical patent/FR2423860A1/fr
Application granted granted Critical
Publication of FR2423860B1 publication Critical patent/FR2423860B1/fr
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/261—Details
    • H01J37/263—Contrast, resolution or power of penetration
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2441—Semiconductor detectors, e.g. diodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/244—Detection characterized by the detecting means
    • H01J2237/2446—Position sensitive detectors
    • H01J2237/24465—Sectored detectors, e.g. quadrants
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/245—Detection characterised by the variable being measured
    • H01J2237/24507—Intensity, dose or other characteristics of particle beams or electromagnetic radiation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Image Processing (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

Microscope électronique pour l'enregistrement d'information de phase, muni d'un detecteur d'électrons divisé en au moins quatre quadrants. En présence d'une composition adéquate des signaux, fournis par chacun des quatre quadrants de détection, ces signaux fournissent une image de phase non différenciée. De plus, lorsque le détecteur est divisé radialement en un plus grand nombre de parties, le rapport signal/bruit de l'image est fortement accru. Application à l'examen des matériaux.
FR7909631A 1978-04-17 1979-04-17 Microscope electronique pour la formation d'une image de phase qui n'est pas deduite d'images de difference Granted FR2423860A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL7804037A NL7804037A (nl) 1978-04-17 1978-04-17 Elektronenmikroskoop met ongedifferentieerde fase- beeldvorming.

Publications (2)

Publication Number Publication Date
FR2423860A1 true FR2423860A1 (fr) 1979-11-16
FR2423860B1 FR2423860B1 (fr) 1985-01-18

Family

ID=19830664

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7909631A Granted FR2423860A1 (fr) 1978-04-17 1979-04-17 Microscope electronique pour la formation d'une image de phase qui n'est pas deduite d'images de difference

Country Status (5)

Country Link
JP (1) JPS54140455A (fr)
DE (1) DE2915204A1 (fr)
FR (1) FR2423860A1 (fr)
GB (1) GB2019691B (fr)
NL (1) NL7804037A (fr)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56165255A (en) * 1980-05-26 1981-12-18 Hitachi Ltd Image indicating method for transmission scan electron microscope
GB8415709D0 (en) * 1984-06-20 1984-07-25 Dubilier Scient Ltd Scanning microscope
NL8402340A (nl) * 1984-07-25 1986-02-17 Philips Nv Microscoop voor niet-gedifferentieerde fase-beeldvorming.
DE3610165A1 (de) * 1985-03-27 1986-10-02 Olympus Optical Co., Ltd., Tokio/Tokyo Optisches abtastmikroskop
GB8509493D0 (en) * 1985-04-12 1985-05-15 Plessey Co Plc Scanning microscopes
JP2567736B2 (ja) * 1990-11-30 1996-12-25 理化学研究所 イオン散乱分析装置
DE10331137B4 (de) * 2003-07-09 2008-04-30 Carl Zeiss Nts Gmbh Detektorsystem für ein Rasterelektronenmikroskop und Rasterelektronenmikroskop mit einem entsprechenden Detektorsystem
EP2194565A1 (fr) * 2008-12-03 2010-06-09 FEI Company Détecteur de champ sombre à utiliser dans un appareil optique à particules chargées
EP2911180A1 (fr) * 2014-02-24 2015-08-26 FEI Company Procédé d'examen d'un échantillon dans un microscope à faisceau de particules chargées

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
FR2220871A1 (fr) * 1973-07-27 1974-10-04 Jeol Ltd
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
FR2300414A2 (fr) * 1975-02-07 1976-09-03 Cgr Mev Dispositif pour le controle de la p

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3626184A (en) * 1970-03-05 1971-12-07 Atomic Energy Commission Detector system for a scanning electron microscope
FR2220871A1 (fr) * 1973-07-27 1974-10-04 Jeol Ltd
US3908124A (en) * 1974-07-01 1975-09-23 Us Energy Phase contrast in high resolution electron microscopy
FR2300414A2 (fr) * 1975-02-07 1976-09-03 Cgr Mev Dispositif pour le controle de la p

Also Published As

Publication number Publication date
JPS54140455A (en) 1979-10-31
FR2423860B1 (fr) 1985-01-18
NL7804037A (nl) 1979-10-19
DE2915204A1 (de) 1979-10-25
GB2019691A (en) 1979-10-31
GB2019691B (en) 1982-08-04

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