JPS5472953A - Scanning method of scanning electron microscope - Google Patents

Scanning method of scanning electron microscope

Info

Publication number
JPS5472953A
JPS5472953A JP14036977A JP14036977A JPS5472953A JP S5472953 A JPS5472953 A JP S5472953A JP 14036977 A JP14036977 A JP 14036977A JP 14036977 A JP14036977 A JP 14036977A JP S5472953 A JPS5472953 A JP S5472953A
Authority
JP
Japan
Prior art keywords
sample
scanning
screen
cathode
supplied
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14036977A
Other languages
Japanese (ja)
Inventor
Minoru Fujisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP14036977A priority Critical patent/JPS5472953A/en
Publication of JPS5472953A publication Critical patent/JPS5472953A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To make an image at the center part of an observation point clear and good in quality, and to remove the flitter on the entire screen by scanning electron beams helically on a sample and screen.
CONSTITUTION: Electron beam 2 from electron-beam generator 1 is focused on sample 4 by lens 3 and deflected perpendicularly by methods 5X and 5Y to scan on sample 4, and the secondary electron beam from the sample 4 is detected 6 and then supplied to the cathode of cathode-ray tube 9 by way of amplifier 7 and signal processing circuit 8. signals from generators 10X and 10Y for sine and cosine waves are modulated 12X and 12Y by the signal of saw-tooth wave genertor 11 rspectively, and both modulation outputs are supplied to deflecting methods 5X and 5Y, and 9X and 9Y, thereby achieving the helical scanning on the sample 4 and the screen of tube 9 with its speed made slow at the center and fast at its circumference.
COPYRIGHT: (C)1979,JPO&Japio
JP14036977A 1977-11-22 1977-11-22 Scanning method of scanning electron microscope Pending JPS5472953A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14036977A JPS5472953A (en) 1977-11-22 1977-11-22 Scanning method of scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14036977A JPS5472953A (en) 1977-11-22 1977-11-22 Scanning method of scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS5472953A true JPS5472953A (en) 1979-06-11

Family

ID=15267215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14036977A Pending JPS5472953A (en) 1977-11-22 1977-11-22 Scanning method of scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS5472953A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60254545A (en) * 1984-05-31 1985-12-16 Rigaku Denki Kogyo Kk Scanning analyzer

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60254545A (en) * 1984-05-31 1985-12-16 Rigaku Denki Kogyo Kk Scanning analyzer

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