JPS5472953A - Scanning method of scanning electron microscope - Google Patents
Scanning method of scanning electron microscopeInfo
- Publication number
- JPS5472953A JPS5472953A JP14036977A JP14036977A JPS5472953A JP S5472953 A JPS5472953 A JP S5472953A JP 14036977 A JP14036977 A JP 14036977A JP 14036977 A JP14036977 A JP 14036977A JP S5472953 A JPS5472953 A JP S5472953A
- Authority
- JP
- Japan
- Prior art keywords
- sample
- scanning
- screen
- cathode
- supplied
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To make an image at the center part of an observation point clear and good in quality, and to remove the flitter on the entire screen by scanning electron beams helically on a sample and screen.
CONSTITUTION: Electron beam 2 from electron-beam generator 1 is focused on sample 4 by lens 3 and deflected perpendicularly by methods 5X and 5Y to scan on sample 4, and the secondary electron beam from the sample 4 is detected 6 and then supplied to the cathode of cathode-ray tube 9 by way of amplifier 7 and signal processing circuit 8. signals from generators 10X and 10Y for sine and cosine waves are modulated 12X and 12Y by the signal of saw-tooth wave genertor 11 rspectively, and both modulation outputs are supplied to deflecting methods 5X and 5Y, and 9X and 9Y, thereby achieving the helical scanning on the sample 4 and the screen of tube 9 with its speed made slow at the center and fast at its circumference.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14036977A JPS5472953A (en) | 1977-11-22 | 1977-11-22 | Scanning method of scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14036977A JPS5472953A (en) | 1977-11-22 | 1977-11-22 | Scanning method of scanning electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5472953A true JPS5472953A (en) | 1979-06-11 |
Family
ID=15267215
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14036977A Pending JPS5472953A (en) | 1977-11-22 | 1977-11-22 | Scanning method of scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5472953A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60254545A (en) * | 1984-05-31 | 1985-12-16 | Rigaku Denki Kogyo Kk | Scanning analyzer |
-
1977
- 1977-11-22 JP JP14036977A patent/JPS5472953A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60254545A (en) * | 1984-05-31 | 1985-12-16 | Rigaku Denki Kogyo Kk | Scanning analyzer |
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