JPS5492052A - Scanning method of scanning electron microscoper and others - Google Patents

Scanning method of scanning electron microscoper and others

Info

Publication number
JPS5492052A
JPS5492052A JP15778877A JP15778877A JPS5492052A JP S5492052 A JPS5492052 A JP S5492052A JP 15778877 A JP15778877 A JP 15778877A JP 15778877 A JP15778877 A JP 15778877A JP S5492052 A JPS5492052 A JP S5492052A
Authority
JP
Japan
Prior art keywords
cathode
ray tube
electron
image
magnification ratio
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP15778877A
Other languages
Japanese (ja)
Inventor
Minoru Fujisawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP15778877A priority Critical patent/JPS5492052A/en
Publication of JPS5492052A publication Critical patent/JPS5492052A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Abstract

PURPOSE:To enable a simultaneous observation of the image on the cathode-ray tube with a high magnification ratio at the center area and a low magnification ratio at the circumference area each by providing the sine wave generator circuit, the saw-tooth signal generator, the modulator, the phase shifter and others between the deflecting coil constituting the electron microscope and the cathode-ray tube displaying the image. CONSTITUTION:Electron beam EB given from electronic gun 1 is condensed through focusing lens 2 and object lens 3 is spot-formed on sample 4. At the same time, deflecting coil 5X and 5Y are provided between lens 2 and 3, the 2-dimensional scanning is given on the sample surface via electron bean EB, and the secondary electron and the reflective electron generated from the sample are detected through detector 6 and amplified throught amplifier 7 to be then supplied to cathode-ray tube 8. In this case, sine wave generator circuit 9X, phase shifter 9Y plus modulator 10X, 10Y, 12X and 12Y, and saw-tooth signal generator 11 and 13 are distributed at the circuit in order to control deflecting coil 14X and 14Y of cathode-ray tube 8. In such way, a low and high magnification ratio are obtained for the image at the center and circumference areas respectively on tube 8.
JP15778877A 1977-12-29 1977-12-29 Scanning method of scanning electron microscoper and others Pending JPS5492052A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15778877A JPS5492052A (en) 1977-12-29 1977-12-29 Scanning method of scanning electron microscoper and others

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15778877A JPS5492052A (en) 1977-12-29 1977-12-29 Scanning method of scanning electron microscoper and others

Publications (1)

Publication Number Publication Date
JPS5492052A true JPS5492052A (en) 1979-07-20

Family

ID=15657296

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15778877A Pending JPS5492052A (en) 1977-12-29 1977-12-29 Scanning method of scanning electron microscoper and others

Country Status (1)

Country Link
JP (1) JPS5492052A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0104593A2 (en) * 1982-09-27 1984-04-04 Siemens Aktiengesellschaft Enhancing process of an area of an object in a scanning electron microscope

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0104593A2 (en) * 1982-09-27 1984-04-04 Siemens Aktiengesellschaft Enhancing process of an area of an object in a scanning electron microscope

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