JPS55151759A - Scanning type electron microscope - Google Patents

Scanning type electron microscope

Info

Publication number
JPS55151759A
JPS55151759A JP6064079A JP6064079A JPS55151759A JP S55151759 A JPS55151759 A JP S55151759A JP 6064079 A JP6064079 A JP 6064079A JP 6064079 A JP6064079 A JP 6064079A JP S55151759 A JPS55151759 A JP S55151759A
Authority
JP
Japan
Prior art keywords
cathode
ray tube
sample
scanning
laster
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6064079A
Other languages
Japanese (ja)
Inventor
Junichi Ooyama
Shuichi Saito
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP6064079A priority Critical patent/JPS55151759A/en
Publication of JPS55151759A publication Critical patent/JPS55151759A/en
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)

Abstract

PURPOSE:To avoid the rotation of sample image on cathode-ray tube by scanning electron beam so that the direction of laster is rotated in a direction that the rotation in the laster direction due to the change in excited current for object lens is negated. CONSTITUTION:Secondary electron or reflecting elecron generated from a sample 4 by the scanning of electron beam is detected by a detector 8 and then supplied through a image amplifier 9 to a cathode-ray tube 10. Scanning signal is supplied to deflecting coils 11X and 11Y of the cathode-ray tube 10 and the scanning image of the sample 4 is displayed on the cathode-ray tube 10. In case where the excited current of a object lens 3 is changed by the change in the position of the sample 4, the rotation of sample image on the cathode-ray tube can be avoided by scanning electron beam so as to rotate the laster direction concurrently.
JP6064079A 1979-05-17 1979-05-17 Scanning type electron microscope Pending JPS55151759A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6064079A JPS55151759A (en) 1979-05-17 1979-05-17 Scanning type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6064079A JPS55151759A (en) 1979-05-17 1979-05-17 Scanning type electron microscope

Publications (1)

Publication Number Publication Date
JPS55151759A true JPS55151759A (en) 1980-11-26

Family

ID=13148111

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6064079A Pending JPS55151759A (en) 1979-05-17 1979-05-17 Scanning type electron microscope

Country Status (1)

Country Link
JP (1) JPS55151759A (en)

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