JPS56148870A - Semiconductor presssure converter - Google Patents

Semiconductor presssure converter

Info

Publication number
JPS56148870A
JPS56148870A JP5171480A JP5171480A JPS56148870A JP S56148870 A JPS56148870 A JP S56148870A JP 5171480 A JP5171480 A JP 5171480A JP 5171480 A JP5171480 A JP 5171480A JP S56148870 A JPS56148870 A JP S56148870A
Authority
JP
Japan
Prior art keywords
pressure
forming
heater
sensitive
converter
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5171480A
Other languages
English (en)
Inventor
Susumu Kimijima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp, Tokyo Shibaura Electric Co Ltd filed Critical Toshiba Corp
Priority to JP5171480A priority Critical patent/JPS56148870A/ja
Publication of JPS56148870A publication Critical patent/JPS56148870A/ja
Pending legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof  ; Multistep manufacturing processes therefor
    • H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
    • H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
JP5171480A 1980-04-21 1980-04-21 Semiconductor presssure converter Pending JPS56148870A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5171480A JPS56148870A (en) 1980-04-21 1980-04-21 Semiconductor presssure converter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5171480A JPS56148870A (en) 1980-04-21 1980-04-21 Semiconductor presssure converter

Publications (1)

Publication Number Publication Date
JPS56148870A true JPS56148870A (en) 1981-11-18

Family

ID=12894554

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5171480A Pending JPS56148870A (en) 1980-04-21 1980-04-21 Semiconductor presssure converter

Country Status (1)

Country Link
JP (1) JPS56148870A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58103637A (ja) * 1981-12-16 1983-06-20 Mitsubishi Electric Corp 半導体圧力センサ
JPH01102841U (ja) * 1987-12-28 1989-07-11
DE19703206C2 (de) * 1997-01-29 2002-01-24 Infineon Technologies Ag Drucksensor-Bauteil mit Schlauchanschluß
WO2012165536A1 (ja) * 2011-05-31 2012-12-06 独立行政法人科学技術振興機構 センサにおける温度補償方法、該温度補償方法の演算プログラム、演算処理装置、及び、センサ

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58103637A (ja) * 1981-12-16 1983-06-20 Mitsubishi Electric Corp 半導体圧力センサ
JPH01102841U (ja) * 1987-12-28 1989-07-11
DE19703206C2 (de) * 1997-01-29 2002-01-24 Infineon Technologies Ag Drucksensor-Bauteil mit Schlauchanschluß
WO2012165536A1 (ja) * 2011-05-31 2012-12-06 独立行政法人科学技術振興機構 センサにおける温度補償方法、該温度補償方法の演算プログラム、演算処理装置、及び、センサ
JPWO2012165536A1 (ja) * 2011-05-31 2015-02-23 独立行政法人科学技術振興機構 センサにおける温度補償方法、該温度補償方法の演算プログラム、演算処理装置、及び、センサ

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