JPS56105669A - Manufacture of mesa type semiconductor pellet - Google Patents
Manufacture of mesa type semiconductor pelletInfo
- Publication number
- JPS56105669A JPS56105669A JP854380A JP854380A JPS56105669A JP S56105669 A JPS56105669 A JP S56105669A JP 854380 A JP854380 A JP 854380A JP 854380 A JP854380 A JP 854380A JP S56105669 A JPS56105669 A JP S56105669A
- Authority
- JP
- Japan
- Prior art keywords
- mask
- holes
- type
- layer
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000008188 pellet Substances 0.000 title abstract 3
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000005530 etching Methods 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229920002120 photoresistant polymer Polymers 0.000 abstract 2
- 238000007650 screen-printing Methods 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Thyristors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP854380A JPS56105669A (en) | 1980-01-28 | 1980-01-28 | Manufacture of mesa type semiconductor pellet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP854380A JPS56105669A (en) | 1980-01-28 | 1980-01-28 | Manufacture of mesa type semiconductor pellet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56105669A true JPS56105669A (en) | 1981-08-22 |
| JPS6341228B2 JPS6341228B2 (enrdf_load_stackoverflow) | 1988-08-16 |
Family
ID=11696051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP854380A Granted JPS56105669A (en) | 1980-01-28 | 1980-01-28 | Manufacture of mesa type semiconductor pellet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56105669A (enrdf_load_stackoverflow) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4040379A1 (de) * | 1990-12-17 | 1992-07-02 | Heidelberger Druckmasch Ag | Vorrichtung zur durchfuehrung von kabel |
-
1980
- 1980-01-28 JP JP854380A patent/JPS56105669A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6341228B2 (enrdf_load_stackoverflow) | 1988-08-16 |
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