JPS54107676A - Manufacture for semiconductor device - Google Patents
Manufacture for semiconductor deviceInfo
- Publication number
- JPS54107676A JPS54107676A JP1473178A JP1473178A JPS54107676A JP S54107676 A JPS54107676 A JP S54107676A JP 1473178 A JP1473178 A JP 1473178A JP 1473178 A JP1473178 A JP 1473178A JP S54107676 A JPS54107676 A JP S54107676A
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- mask
- normal
- shape
- pattern width
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Weting (AREA)
Abstract
PURPOSE: To accurately form the shape of the edge part for the fine pattern of around 1 to 5μm, with normal pattern width in normal mask alignment unit.
CONSTITUTION: Poly Si 3 and SiO2 4 are laminated on the SiO2 2 on the Si substrate 1. The resist mask 5 having the normal pattern width a and b is formed and the film 4 is etched, eliminating the mask. The resist mask 6 having the normal pattern width c and d is again formed, the film 3 is etched, the mask is eliminated, forming the fine pattern of the pattern width e = 1 to 5 μm. Since the sidths b to d are great enough not to be subjected to the interferrence due to the adjacent pattern, the shape is not destructed and the pattern having sure shape can be formed.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1473178A JPS54107676A (en) | 1978-02-10 | 1978-02-10 | Manufacture for semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1473178A JPS54107676A (en) | 1978-02-10 | 1978-02-10 | Manufacture for semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54107676A true JPS54107676A (en) | 1979-08-23 |
Family
ID=11869264
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1473178A Pending JPS54107676A (en) | 1978-02-10 | 1978-02-10 | Manufacture for semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54107676A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911577A (en) * | 1972-06-01 | 1974-02-01 |
-
1978
- 1978-02-10 JP JP1473178A patent/JPS54107676A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4911577A (en) * | 1972-06-01 | 1974-02-01 |
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