JPS56169348A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS56169348A JPS56169348A JP7153480A JP7153480A JPS56169348A JP S56169348 A JPS56169348 A JP S56169348A JP 7153480 A JP7153480 A JP 7153480A JP 7153480 A JP7153480 A JP 7153480A JP S56169348 A JPS56169348 A JP S56169348A
- Authority
- JP
- Japan
- Prior art keywords
- film
- rectangular
- mask
- substrate
- corners
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Abstract
PURPOSE:To suppress the occurrence of a crystalline defect in a semiconductor device by burying an oxidized film in a depthwise direction in the periphery of a rectangular element region and cutting out the rectangular corners, thereby alleviating the strains. CONSTITUTION:An SiO2 film 16, and an Si3N4 film 17 are superposed on an Si substrate 15, and a resist mask 18 is formed. The corners of a rectangular mask pattern are partly cut out. Then, the layer 17 is etched, the mask 18 is removed, the substrate is thermally oxidized, and a field oxidized film 19 is formed. According to this configuration, a crystalline defect does not occur due to the concentration of the strain in the small pattern having less than 20mum of one side size, and leakage current is reduced, thereby improving the characteristics thereby.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7153480A JPS56169348A (en) | 1980-05-30 | 1980-05-30 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7153480A JPS56169348A (en) | 1980-05-30 | 1980-05-30 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS56169348A true JPS56169348A (en) | 1981-12-26 |
Family
ID=13463491
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7153480A Pending JPS56169348A (en) | 1980-05-30 | 1980-05-30 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS56169348A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5972740A (en) * | 1982-10-19 | 1984-04-24 | Nec Corp | Semiconductor integrated circuit device and manufacture thereof |
JPS6276655A (en) * | 1985-09-30 | 1987-04-08 | Toshiba Corp | Semiconductor integrated circuit device |
-
1980
- 1980-05-30 JP JP7153480A patent/JPS56169348A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5972740A (en) * | 1982-10-19 | 1984-04-24 | Nec Corp | Semiconductor integrated circuit device and manufacture thereof |
JPS6276655A (en) * | 1985-09-30 | 1987-04-08 | Toshiba Corp | Semiconductor integrated circuit device |
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