JPS54114079A - Mesa-type semiconductor device - Google Patents
Mesa-type semiconductor deviceInfo
- Publication number
- JPS54114079A JPS54114079A JP2110778A JP2110778A JPS54114079A JP S54114079 A JPS54114079 A JP S54114079A JP 2110778 A JP2110778 A JP 2110778A JP 2110778 A JP2110778 A JP 2110778A JP S54114079 A JPS54114079 A JP S54114079A
- Authority
- JP
- Japan
- Prior art keywords
- region
- mesa
- layer
- resist
- trapezoid part
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Local Oxidation Of Silicon (AREA)
- Junction Field-Effect Transistors (AREA)
Abstract
PURPOSE: To secure a height difference of ±0.5μm between the trapezoid part coated with the insulator film and the area except for the trapezoid part and thus to facilitate the formation of the micropattern electrode on the trapezoid part for the mesa-type semiconductor device which uses the trapezoid part of the semiconduc tor layer as the active region.
CONSTITUTION: Buffer layer 2 and active layer 3 are formed in lamination on semiconductor substrate 1, and the mesa-like region of layer 3 is covered with photo resist 8. Then the selective etching is applied using resist 8 as the mask to make only necessary region 3 remain and to remove other regions, and the entire surface is covered with insulator film 6 made of glass, SiO, SiO2, Si3N4 and the like. After this, resist 8 and film 6 coated on 8 are removed together to expose region 3. In this case, a height difference of ±0.5μm between region 3 and mesa edge part 7 at the boundary between region 3 and its surrounding film 6. As a result, no disconnection is caused to the wiring formed on the gate finger even through the gate finger features a small width.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2110778A JPS54114079A (en) | 1978-02-24 | 1978-02-24 | Mesa-type semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2110778A JPS54114079A (en) | 1978-02-24 | 1978-02-24 | Mesa-type semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54114079A true JPS54114079A (en) | 1979-09-05 |
Family
ID=12045644
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2110778A Pending JPS54114079A (en) | 1978-02-24 | 1978-02-24 | Mesa-type semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54114079A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138086A (en) * | 1983-01-25 | 1984-08-08 | シャープ株式会社 | Substrate connecting method |
-
1978
- 1978-02-24 JP JP2110778A patent/JPS54114079A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS59138086A (en) * | 1983-01-25 | 1984-08-08 | シャープ株式会社 | Substrate connecting method |
JPH0151033B2 (en) * | 1983-01-25 | 1989-11-01 | Sharp Kk |
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