JPS6341228B2 - - Google Patents
Info
- Publication number
- JPS6341228B2 JPS6341228B2 JP55008543A JP854380A JPS6341228B2 JP S6341228 B2 JPS6341228 B2 JP S6341228B2 JP 55008543 A JP55008543 A JP 55008543A JP 854380 A JP854380 A JP 854380A JP S6341228 B2 JPS6341228 B2 JP S6341228B2
- Authority
- JP
- Japan
- Prior art keywords
- mask
- mesa
- oxide film
- etching
- silicon substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000005530 etching Methods 0.000 claims description 19
- 239000000758 substrate Substances 0.000 claims description 16
- 238000000034 method Methods 0.000 claims description 15
- 239000008188 pellet Substances 0.000 claims description 12
- 239000004065 semiconductor Substances 0.000 claims description 12
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000007650 screen-printing Methods 0.000 claims description 5
- 238000004519 manufacturing process Methods 0.000 claims description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 15
- 229910052710 silicon Inorganic materials 0.000 description 15
- 239000010703 silicon Substances 0.000 description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 229910052814 silicon oxide Inorganic materials 0.000 description 8
- 229920002120 photoresistant polymer Polymers 0.000 description 6
- 239000011521 glass Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000007639 printing Methods 0.000 description 3
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Bipolar Transistors (AREA)
- Thyristors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP854380A JPS56105669A (en) | 1980-01-28 | 1980-01-28 | Manufacture of mesa type semiconductor pellet |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP854380A JPS56105669A (en) | 1980-01-28 | 1980-01-28 | Manufacture of mesa type semiconductor pellet |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS56105669A JPS56105669A (en) | 1981-08-22 |
| JPS6341228B2 true JPS6341228B2 (enrdf_load_stackoverflow) | 1988-08-16 |
Family
ID=11696051
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP854380A Granted JPS56105669A (en) | 1980-01-28 | 1980-01-28 | Manufacture of mesa type semiconductor pellet |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS56105669A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04295217A (ja) * | 1990-12-17 | 1992-10-20 | Heidelberger Druckmas Ag | ケーブル引入れ装置 |
-
1980
- 1980-01-28 JP JP854380A patent/JPS56105669A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04295217A (ja) * | 1990-12-17 | 1992-10-20 | Heidelberger Druckmas Ag | ケーブル引入れ装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS56105669A (en) | 1981-08-22 |
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