JPS553686A - Preparation of semiconductor device - Google Patents
Preparation of semiconductor deviceInfo
- Publication number
- JPS553686A JPS553686A JP7687278A JP7687278A JPS553686A JP S553686 A JPS553686 A JP S553686A JP 7687278 A JP7687278 A JP 7687278A JP 7687278 A JP7687278 A JP 7687278A JP S553686 A JPS553686 A JP S553686A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- polymerized
- mask
- base
- masks
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7687278A JPS553686A (en) | 1978-06-23 | 1978-06-23 | Preparation of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7687278A JPS553686A (en) | 1978-06-23 | 1978-06-23 | Preparation of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS553686A true JPS553686A (en) | 1980-01-11 |
Family
ID=13617719
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7687278A Pending JPS553686A (en) | 1978-06-23 | 1978-06-23 | Preparation of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS553686A (ja) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5710969A (en) * | 1980-06-25 | 1982-01-20 | Nec Corp | Semiconductor device and manufacture thereof |
JPS58110074A (ja) * | 1981-12-23 | 1983-06-30 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JPS59960A (ja) * | 1982-06-25 | 1984-01-06 | Matsushita Electronics Corp | 半導体装置およびその製造方法 |
-
1978
- 1978-06-23 JP JP7687278A patent/JPS553686A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5710969A (en) * | 1980-06-25 | 1982-01-20 | Nec Corp | Semiconductor device and manufacture thereof |
JPS58110074A (ja) * | 1981-12-23 | 1983-06-30 | Matsushita Electric Ind Co Ltd | 半導体装置およびその製造方法 |
JPH0358172B2 (ja) * | 1981-12-23 | 1991-09-04 | Matsushita Electric Ind Co Ltd | |
JPS59960A (ja) * | 1982-06-25 | 1984-01-06 | Matsushita Electronics Corp | 半導体装置およびその製造方法 |
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