JPS553686A - Preparation of semiconductor device - Google Patents

Preparation of semiconductor device

Info

Publication number
JPS553686A
JPS553686A JP7687278A JP7687278A JPS553686A JP S553686 A JPS553686 A JP S553686A JP 7687278 A JP7687278 A JP 7687278A JP 7687278 A JP7687278 A JP 7687278A JP S553686 A JPS553686 A JP S553686A
Authority
JP
Japan
Prior art keywords
layer
polymerized
mask
base
masks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7687278A
Other languages
English (en)
Inventor
Tsutomu Fujita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP7687278A priority Critical patent/JPS553686A/ja
Publication of JPS553686A publication Critical patent/JPS553686A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Bipolar Transistors (AREA)
JP7687278A 1978-06-23 1978-06-23 Preparation of semiconductor device Pending JPS553686A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7687278A JPS553686A (en) 1978-06-23 1978-06-23 Preparation of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7687278A JPS553686A (en) 1978-06-23 1978-06-23 Preparation of semiconductor device

Publications (1)

Publication Number Publication Date
JPS553686A true JPS553686A (en) 1980-01-11

Family

ID=13617719

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7687278A Pending JPS553686A (en) 1978-06-23 1978-06-23 Preparation of semiconductor device

Country Status (1)

Country Link
JP (1) JPS553686A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5710969A (en) * 1980-06-25 1982-01-20 Nec Corp Semiconductor device and manufacture thereof
JPS58110074A (ja) * 1981-12-23 1983-06-30 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
JPS59960A (ja) * 1982-06-25 1984-01-06 Matsushita Electronics Corp 半導体装置およびその製造方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5710969A (en) * 1980-06-25 1982-01-20 Nec Corp Semiconductor device and manufacture thereof
JPS58110074A (ja) * 1981-12-23 1983-06-30 Matsushita Electric Ind Co Ltd 半導体装置およびその製造方法
JPH0358172B2 (ja) * 1981-12-23 1991-09-04 Matsushita Electric Ind Co Ltd
JPS59960A (ja) * 1982-06-25 1984-01-06 Matsushita Electronics Corp 半導体装置およびその製造方法

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