JPS55110059A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS55110059A JPS55110059A JP1739979A JP1739979A JPS55110059A JP S55110059 A JPS55110059 A JP S55110059A JP 1739979 A JP1739979 A JP 1739979A JP 1739979 A JP1739979 A JP 1739979A JP S55110059 A JPS55110059 A JP S55110059A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- film
- cut
- substrate
- layers
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title abstract 2
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 238000009792 diffusion process Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000002184 metal Substances 0.000 abstract 1
- 238000001259 photo etching Methods 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1739979A JPS55110059A (en) | 1979-02-16 | 1979-02-16 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1739979A JPS55110059A (en) | 1979-02-16 | 1979-02-16 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS55110059A true JPS55110059A (en) | 1980-08-25 |
| JPS6115583B2 JPS6115583B2 (enExample) | 1986-04-24 |
Family
ID=11942909
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1739979A Granted JPS55110059A (en) | 1979-02-16 | 1979-02-16 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS55110059A (enExample) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02114312A (ja) * | 1988-10-24 | 1990-04-26 | Yokogawa Electric Corp | 光学式検出装置 |
-
1979
- 1979-02-16 JP JP1739979A patent/JPS55110059A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6115583B2 (enExample) | 1986-04-24 |
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