JPS57188847A - Semiconductor device - Google Patents
Semiconductor deviceInfo
- Publication number
- JPS57188847A JPS57188847A JP7354481A JP7354481A JPS57188847A JP S57188847 A JPS57188847 A JP S57188847A JP 7354481 A JP7354481 A JP 7354481A JP 7354481 A JP7354481 A JP 7354481A JP S57188847 A JPS57188847 A JP S57188847A
- Authority
- JP
- Japan
- Prior art keywords
- polycrystal
- direct contact
- layers
- film
- section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Electrodes Of Semiconductors (AREA)
Abstract
PURPOSE:To prevent the existence of metals, to reduce contact resistance and to improve direct contact by forming a normal wiring section by metal-polycrystal silicon and forming a direct contact section with the base body side only by polycrystal silicon. CONSTITUTION:An insulating layer 2 and a gate insulating film 3 are formed onto a semiconductor substrate 1, and gate electrodes and wiring consisting of polycrystal 5a, 5b, 5c and Mo films 7a, 7b, 7c are shaped. An impurity is injected by ion beams 8, the Mo film 7b of the direct contact region is removed, source and drain regions 10, 11 are formed through impurity diffusion, and a PSG film 12 and Al electrode wiring 15, 16, 17 are shaped. The increase of contact resistance generated among the Mo layers and the polycrystal Si layers is avoided because the direct contact section with the base body side has no Mo layer and consists of only the polycrystal Si layers.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7354481A JPS57188847A (en) | 1981-05-18 | 1981-05-18 | Semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7354481A JPS57188847A (en) | 1981-05-18 | 1981-05-18 | Semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57188847A true JPS57188847A (en) | 1982-11-19 |
Family
ID=13521278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7354481A Pending JPS57188847A (en) | 1981-05-18 | 1981-05-18 | Semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57188847A (en) |
-
1981
- 1981-05-18 JP JP7354481A patent/JPS57188847A/en active Pending
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