JPS54154271A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54154271A JPS54154271A JP6317078A JP6317078A JPS54154271A JP S54154271 A JPS54154271 A JP S54154271A JP 6317078 A JP6317078 A JP 6317078A JP 6317078 A JP6317078 A JP 6317078A JP S54154271 A JPS54154271 A JP S54154271A
- Authority
- JP
- Japan
- Prior art keywords
- film
- region
- sio
- drilled
- mask
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Electrodes Of Semiconductors (AREA)
- Bipolar Transistors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6317078A JPS54154271A (en) | 1978-05-25 | 1978-05-25 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6317078A JPS54154271A (en) | 1978-05-25 | 1978-05-25 | Manufacture of semiconductor device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS54154271A true JPS54154271A (en) | 1979-12-05 |
JPH0137856B2 JPH0137856B2 (ja) | 1989-08-09 |
Family
ID=13221503
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6317078A Granted JPS54154271A (en) | 1978-05-25 | 1978-05-25 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54154271A (ja) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5690559A (en) * | 1979-12-22 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5796567A (en) * | 1980-12-09 | 1982-06-15 | Nec Corp | Manufacture of semiconductor device |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49127575A (ja) * | 1973-04-06 | 1974-12-06 | ||
JPS52119192A (en) * | 1976-03-31 | 1977-10-06 | Nec Corp | Semiconductor |
JPS52149477A (en) * | 1976-06-07 | 1977-12-12 | Fujitsu Ltd | Forming method of schottky barriers |
-
1978
- 1978-05-25 JP JP6317078A patent/JPS54154271A/ja active Granted
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49127575A (ja) * | 1973-04-06 | 1974-12-06 | ||
JPS52119192A (en) * | 1976-03-31 | 1977-10-06 | Nec Corp | Semiconductor |
JPS52149477A (en) * | 1976-06-07 | 1977-12-12 | Fujitsu Ltd | Forming method of schottky barriers |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5690559A (en) * | 1979-12-22 | 1981-07-22 | Fujitsu Ltd | Manufacture of semiconductor device |
JPS5796567A (en) * | 1980-12-09 | 1982-06-15 | Nec Corp | Manufacture of semiconductor device |
Also Published As
Publication number | Publication date |
---|---|
JPH0137856B2 (ja) | 1989-08-09 |
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