JPS54154271A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS54154271A
JPS54154271A JP6317078A JP6317078A JPS54154271A JP S54154271 A JPS54154271 A JP S54154271A JP 6317078 A JP6317078 A JP 6317078A JP 6317078 A JP6317078 A JP 6317078A JP S54154271 A JPS54154271 A JP S54154271A
Authority
JP
Japan
Prior art keywords
film
region
sio
drilled
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6317078A
Other languages
English (en)
Other versions
JPH0137856B2 (ja
Inventor
Yasutaka Ikushima
Takehiko Kubota
Tsutomu Tashiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP6317078A priority Critical patent/JPS54154271A/ja
Publication of JPS54154271A publication Critical patent/JPS54154271A/ja
Publication of JPH0137856B2 publication Critical patent/JPH0137856B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Bipolar Transistors (AREA)
JP6317078A 1978-05-25 1978-05-25 Manufacture of semiconductor device Granted JPS54154271A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6317078A JPS54154271A (en) 1978-05-25 1978-05-25 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6317078A JPS54154271A (en) 1978-05-25 1978-05-25 Manufacture of semiconductor device

Publications (2)

Publication Number Publication Date
JPS54154271A true JPS54154271A (en) 1979-12-05
JPH0137856B2 JPH0137856B2 (ja) 1989-08-09

Family

ID=13221503

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6317078A Granted JPS54154271A (en) 1978-05-25 1978-05-25 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS54154271A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690559A (en) * 1979-12-22 1981-07-22 Fujitsu Ltd Manufacture of semiconductor device
JPS5796567A (en) * 1980-12-09 1982-06-15 Nec Corp Manufacture of semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127575A (ja) * 1973-04-06 1974-12-06
JPS52119192A (en) * 1976-03-31 1977-10-06 Nec Corp Semiconductor
JPS52149477A (en) * 1976-06-07 1977-12-12 Fujitsu Ltd Forming method of schottky barriers

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49127575A (ja) * 1973-04-06 1974-12-06
JPS52119192A (en) * 1976-03-31 1977-10-06 Nec Corp Semiconductor
JPS52149477A (en) * 1976-06-07 1977-12-12 Fujitsu Ltd Forming method of schottky barriers

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5690559A (en) * 1979-12-22 1981-07-22 Fujitsu Ltd Manufacture of semiconductor device
JPS5796567A (en) * 1980-12-09 1982-06-15 Nec Corp Manufacture of semiconductor device

Also Published As

Publication number Publication date
JPH0137856B2 (ja) 1989-08-09

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