JPS54152478A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS54152478A JPS54152478A JP6149378A JP6149378A JPS54152478A JP S54152478 A JPS54152478 A JP S54152478A JP 6149378 A JP6149378 A JP 6149378A JP 6149378 A JP6149378 A JP 6149378A JP S54152478 A JPS54152478 A JP S54152478A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- sio
- super
- layers
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To realize free and well-reproducible control of the impurity distribution of cathode region of a super-stair-case junction part which can not be performed by a conventional method, by repeating epitaxial growth and selective diffusion.
CONSTITUTION: On N+-type Si substrate 11, N epitaxial layer 12 is stacked and SiO2 film 13 is provided with an opening, where N+ layer 14 is formed. It is recommended to use, especially, Sb and As small in diffusion coefficient. After film 13 is removed, epitaxial layer 17 is formed by vapor-phase growth and SiO2 mask 13' is used to form N-type diffusion layer 18 right over layer 14. Under various conditions, layers 14 and 18 can be made N+ layers of complex distribution by combining various impurities. Further, an element with super-staircase junction can be formed by forming P+ layer 15 in the same region. Consequently, mass-production can be realized with good reproducibility and uniformity of various characteristics of a varactor diode.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6149378A JPS54152478A (en) | 1978-05-22 | 1978-05-22 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6149378A JPS54152478A (en) | 1978-05-22 | 1978-05-22 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54152478A true JPS54152478A (en) | 1979-11-30 |
Family
ID=13172666
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6149378A Pending JPS54152478A (en) | 1978-05-22 | 1978-05-22 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54152478A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4826195A (en) * | 1971-08-07 | 1973-04-05 |
-
1978
- 1978-05-22 JP JP6149378A patent/JPS54152478A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4826195A (en) * | 1971-08-07 | 1973-04-05 |
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