JPS54105485A - Manufacture of semiconductor unit - Google Patents
Manufacture of semiconductor unitInfo
- Publication number
- JPS54105485A JPS54105485A JP1284178A JP1284178A JPS54105485A JP S54105485 A JPS54105485 A JP S54105485A JP 1284178 A JP1284178 A JP 1284178A JP 1284178 A JP1284178 A JP 1284178A JP S54105485 A JPS54105485 A JP S54105485A
- Authority
- JP
- Japan
- Prior art keywords
- membrane
- sio
- impurity
- constitution
- unit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
Abstract
PURPOSE: To provide a highly resistive unit with excellent repeatability by selectively making polycrystalline Si on insulating membrane on semiconductor substrate electrically conductive.
CONSTITUTION: Poly Si 3 is formed on SiO22 on Si substrate 1 and the required value of resistance is obtained by adding the impurity on overall surface. Then, membrane 3 is photo-etched and SiO24.Si3N45 are laminated. Membranes 4 and 5 are photoetched again, the required pattern is provided, the required quantity of impurity is doped on the unmasked portions 3a and 3b on membrane 5 and, then, the terminal of resisting unit is picked up from layers 3a and 3b. The allowable thickness of Si3N4 is approximately 500Å. With this constitution, a resisting unit with specially high resistance is obtained with excellent repeatability.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1284178A JPS54105485A (en) | 1978-02-06 | 1978-02-06 | Manufacture of semiconductor unit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1284178A JPS54105485A (en) | 1978-02-06 | 1978-02-06 | Manufacture of semiconductor unit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54105485A true JPS54105485A (en) | 1979-08-18 |
Family
ID=11816601
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1284178A Pending JPS54105485A (en) | 1978-02-06 | 1978-02-06 | Manufacture of semiconductor unit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54105485A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57128054A (en) * | 1981-12-21 | 1982-08-09 | Hitachi Ltd | Semiconductor device |
JPS57210660A (en) * | 1981-06-19 | 1982-12-24 | Seiko Epson Corp | Static ram |
JPS63158863A (en) * | 1987-11-06 | 1988-07-01 | Seiko Epson Corp | Static ram |
-
1978
- 1978-02-06 JP JP1284178A patent/JPS54105485A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57210660A (en) * | 1981-06-19 | 1982-12-24 | Seiko Epson Corp | Static ram |
JPS57128054A (en) * | 1981-12-21 | 1982-08-09 | Hitachi Ltd | Semiconductor device |
JPS63158863A (en) * | 1987-11-06 | 1988-07-01 | Seiko Epson Corp | Static ram |
JPH0516186B2 (en) * | 1987-11-06 | 1993-03-03 | Seiko Epson Corp |
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