JPS533363A - Measurement method and measurement device - Google Patents

Measurement method and measurement device

Info

Publication number
JPS533363A
JPS533363A JP7719076A JP7719076A JPS533363A JP S533363 A JPS533363 A JP S533363A JP 7719076 A JP7719076 A JP 7719076A JP 7719076 A JP7719076 A JP 7719076A JP S533363 A JPS533363 A JP S533363A
Authority
JP
Japan
Prior art keywords
measurement
measurement device
elasping
asimple
refraction
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7719076A
Other languages
English (en)
Other versions
JPS6249562B2 (ja
Inventor
Minokichi Ban
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP7719076A priority Critical patent/JPS533363A/ja
Publication of JPS533363A publication Critical patent/JPS533363A/ja
Publication of JPS6249562B2 publication Critical patent/JPS6249562B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP7719076A 1976-06-30 1976-06-30 Measurement method and measurement device Granted JPS533363A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7719076A JPS533363A (en) 1976-06-30 1976-06-30 Measurement method and measurement device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7719076A JPS533363A (en) 1976-06-30 1976-06-30 Measurement method and measurement device

Publications (2)

Publication Number Publication Date
JPS533363A true JPS533363A (en) 1978-01-13
JPS6249562B2 JPS6249562B2 (ja) 1987-10-20

Family

ID=13626886

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7719076A Granted JPS533363A (en) 1976-06-30 1976-06-30 Measurement method and measurement device

Country Status (1)

Country Link
JP (1) JPS533363A (ja)

Cited By (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60127403A (ja) * 1983-12-13 1985-07-08 Anritsu Corp 厚み測定装置
JPS61294338A (ja) * 1985-06-21 1986-12-25 Agency Of Ind Science & Technol 干渉法膜屈折率測定装置
JPS6211106A (ja) * 1985-03-01 1987-01-20 Agency Of Ind Science & Technol 干渉法膜厚測定装置
JPS6382307A (ja) * 1986-09-26 1988-04-13 Agency Of Ind Science & Technol ビ−ム走査型干渉法膜厚測定装置
JPS6441838A (en) * 1987-08-08 1989-02-14 Mitsubishi Chem Ind Measurement of electrooptic effect for thin film
WO1989002572A1 (en) * 1987-09-18 1989-03-23 Ricoh Company Ltd. Method and apparatus for measuring refractive index and film thickness
DE3890776T1 (de) * 1987-09-18 1989-08-17 Ricoh Kk Verfahren und einrichtung zum messen von brechungsindex und dicke einer duennschicht
US4893024A (en) * 1987-05-25 1990-01-09 Kurashiki Boseki Kabushiki Kaisha Apparatus for measuring the thickness of a thin film with angle detection means
JPH02196905A (ja) * 1981-12-02 1990-08-03 Advanced Semiconductor Prod 光学的薄膜体の膜厚測定方法
US4999014A (en) * 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
JPH062122U (ja) * 1992-06-15 1994-01-14 横河電機株式会社 横ずらし干渉計
DE19520094A1 (de) * 1995-06-01 1996-12-05 Bayer Ag Vorrichtung zur Messung der optischen Transmission und Dicke transparenter Materialien
JPH1038753A (ja) * 1996-07-26 1998-02-13 Dainippon Printing Co Ltd 透明膜の検査方法
JP2013148509A (ja) * 2012-01-20 2013-08-01 Canon Inc 画像処理装置及び画像処理方法
CN109632711A (zh) * 2019-01-10 2019-04-16 金华伏安光电科技有限公司 一种ps小球层数检测装置

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0579922B2 (ja) * 1981-12-02 1993-11-05 Advanced Semiconductor Prod
JPH02196905A (ja) * 1981-12-02 1990-08-03 Advanced Semiconductor Prod 光学的薄膜体の膜厚測定方法
US4660980A (en) * 1983-12-13 1987-04-28 Anritsu Electric Company Limited Apparatus for measuring thickness of object transparent to light utilizing interferometric method
JPS60127403A (ja) * 1983-12-13 1985-07-08 Anritsu Corp 厚み測定装置
JPH0374763B2 (ja) * 1983-12-13 1991-11-28
JPS6211106A (ja) * 1985-03-01 1987-01-20 Agency Of Ind Science & Technol 干渉法膜厚測定装置
JPS61294338A (ja) * 1985-06-21 1986-12-25 Agency Of Ind Science & Technol 干渉法膜屈折率測定装置
JPS6382307A (ja) * 1986-09-26 1988-04-13 Agency Of Ind Science & Technol ビ−ム走査型干渉法膜厚測定装置
US4893024A (en) * 1987-05-25 1990-01-09 Kurashiki Boseki Kabushiki Kaisha Apparatus for measuring the thickness of a thin film with angle detection means
JPS6441838A (en) * 1987-08-08 1989-02-14 Mitsubishi Chem Ind Measurement of electrooptic effect for thin film
WO1989002572A1 (en) * 1987-09-18 1989-03-23 Ricoh Company Ltd. Method and apparatus for measuring refractive index and film thickness
DE3890776T1 (de) * 1987-09-18 1989-08-17 Ricoh Kk Verfahren und einrichtung zum messen von brechungsindex und dicke einer duennschicht
US5034617A (en) * 1987-09-18 1991-07-23 Ricoh Company, Ltd. Method and apparatus for measuring refractive index and thickness of film
US4999014A (en) * 1989-05-04 1991-03-12 Therma-Wave, Inc. Method and apparatus for measuring thickness of thin films
JPH062122U (ja) * 1992-06-15 1994-01-14 横河電機株式会社 横ずらし干渉計
DE19520094A1 (de) * 1995-06-01 1996-12-05 Bayer Ag Vorrichtung zur Messung der optischen Transmission und Dicke transparenter Materialien
JPH1038753A (ja) * 1996-07-26 1998-02-13 Dainippon Printing Co Ltd 透明膜の検査方法
JP2013148509A (ja) * 2012-01-20 2013-08-01 Canon Inc 画像処理装置及び画像処理方法
CN109632711A (zh) * 2019-01-10 2019-04-16 金华伏安光电科技有限公司 一种ps小球层数检测装置
CN109632711B (zh) * 2019-01-10 2021-10-01 山东拓步教育科技有限公司 一种ps小球层数检测装置

Also Published As

Publication number Publication date
JPS6249562B2 (ja) 1987-10-20

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