JPS5342758A - Interference measuring method - Google Patents
Interference measuring methodInfo
- Publication number
- JPS5342758A JPS5342758A JP11688076A JP11688076A JPS5342758A JP S5342758 A JPS5342758 A JP S5342758A JP 11688076 A JP11688076 A JP 11688076A JP 11688076 A JP11688076 A JP 11688076A JP S5342758 A JPS5342758 A JP S5342758A
- Authority
- JP
- Japan
- Prior art keywords
- measuring method
- interference measuring
- light sources
- photo detectors
- physcal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE: To measure physcal constants such as film thickness, refractive index, etc. of a transparent material in the absence of contact and destruction and at high sensitivity by using light sources or photo detectors of mutually varying characteristics for at least one of the light sources or photo detectors.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11688076A JPS5912121B2 (en) | 1976-09-29 | 1976-09-29 | interferometry |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11688076A JPS5912121B2 (en) | 1976-09-29 | 1976-09-29 | interferometry |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5342758A true JPS5342758A (en) | 1978-04-18 |
JPS5912121B2 JPS5912121B2 (en) | 1984-03-21 |
Family
ID=14697913
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11688076A Expired JPS5912121B2 (en) | 1976-09-29 | 1976-09-29 | interferometry |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5912121B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6176295U (en) * | 1984-10-26 | 1986-05-22 | ||
JPH05302816A (en) * | 1992-04-28 | 1993-11-16 | Jasco Corp | Semiconductor film thickness measuring device |
-
1976
- 1976-09-29 JP JP11688076A patent/JPS5912121B2/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6176295U (en) * | 1984-10-26 | 1986-05-22 | ||
JPH035831Y2 (en) * | 1984-10-26 | 1991-02-14 | ||
JPH05302816A (en) * | 1992-04-28 | 1993-11-16 | Jasco Corp | Semiconductor film thickness measuring device |
Also Published As
Publication number | Publication date |
---|---|
JPS5912121B2 (en) | 1984-03-21 |
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