JPS5342758A - Interference measuring method - Google Patents

Interference measuring method

Info

Publication number
JPS5342758A
JPS5342758A JP11688076A JP11688076A JPS5342758A JP S5342758 A JPS5342758 A JP S5342758A JP 11688076 A JP11688076 A JP 11688076A JP 11688076 A JP11688076 A JP 11688076A JP S5342758 A JPS5342758 A JP S5342758A
Authority
JP
Japan
Prior art keywords
measuring method
interference measuring
light sources
photo detectors
physcal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11688076A
Other languages
Japanese (ja)
Other versions
JPS5912121B2 (en
Inventor
Tetsuo Kuwayama
Nobuyoshi Tanaka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP11688076A priority Critical patent/JPS5912121B2/en
Publication of JPS5342758A publication Critical patent/JPS5342758A/en
Publication of JPS5912121B2 publication Critical patent/JPS5912121B2/en
Expired legal-status Critical Current

Links

Abstract

PURPOSE: To measure physcal constants such as film thickness, refractive index, etc. of a transparent material in the absence of contact and destruction and at high sensitivity by using light sources or photo detectors of mutually varying characteristics for at least one of the light sources or photo detectors.
COPYRIGHT: (C)1978,JPO&Japio
JP11688076A 1976-09-29 1976-09-29 interferometry Expired JPS5912121B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11688076A JPS5912121B2 (en) 1976-09-29 1976-09-29 interferometry

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11688076A JPS5912121B2 (en) 1976-09-29 1976-09-29 interferometry

Publications (2)

Publication Number Publication Date
JPS5342758A true JPS5342758A (en) 1978-04-18
JPS5912121B2 JPS5912121B2 (en) 1984-03-21

Family

ID=14697913

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11688076A Expired JPS5912121B2 (en) 1976-09-29 1976-09-29 interferometry

Country Status (1)

Country Link
JP (1) JPS5912121B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176295U (en) * 1984-10-26 1986-05-22
JPH05302816A (en) * 1992-04-28 1993-11-16 Jasco Corp Semiconductor film thickness measuring device

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6176295U (en) * 1984-10-26 1986-05-22
JPH035831Y2 (en) * 1984-10-26 1991-02-14
JPH05302816A (en) * 1992-04-28 1993-11-16 Jasco Corp Semiconductor film thickness measuring device

Also Published As

Publication number Publication date
JPS5912121B2 (en) 1984-03-21

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