JPS5287358A - Counting method for semiconductor pellets - Google Patents

Counting method for semiconductor pellets

Info

Publication number
JPS5287358A
JPS5287358A JP423076A JP423076A JPS5287358A JP S5287358 A JPS5287358 A JP S5287358A JP 423076 A JP423076 A JP 423076A JP 423076 A JP423076 A JP 423076A JP S5287358 A JPS5287358 A JP S5287358A
Authority
JP
Japan
Prior art keywords
semiconductor pellets
counting method
pellets
thin plate
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP423076A
Other languages
Japanese (ja)
Inventor
Motoyuki Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP423076A priority Critical patent/JPS5287358A/en
Publication of JPS5287358A publication Critical patent/JPS5287358A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: Number of pellets on a thin plate is counted by providing a light source on one side of a transparent plate placed thereon with semiconductor pellets which are disposed mutually spacially and are removed of defectives and a photo detector on the other side thereof, and detecting the intensity of the transmitted light while moving the thin plate subsequently in X, Y directions.
COPYRIGHT: (C)1977,JPO&Japio
JP423076A 1976-01-17 1976-01-17 Counting method for semiconductor pellets Pending JPS5287358A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP423076A JPS5287358A (en) 1976-01-17 1976-01-17 Counting method for semiconductor pellets

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP423076A JPS5287358A (en) 1976-01-17 1976-01-17 Counting method for semiconductor pellets

Publications (1)

Publication Number Publication Date
JPS5287358A true JPS5287358A (en) 1977-07-21

Family

ID=11578758

Family Applications (1)

Application Number Title Priority Date Filing Date
JP423076A Pending JPS5287358A (en) 1976-01-17 1976-01-17 Counting method for semiconductor pellets

Country Status (1)

Country Link
JP (1) JPS5287358A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571070U (en) * 1978-11-09 1980-05-16

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5571070U (en) * 1978-11-09 1980-05-16

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