JPS5253447A - Measuring method - Google Patents

Measuring method

Info

Publication number
JPS5253447A
JPS5253447A JP12910575A JP12910575A JPS5253447A JP S5253447 A JPS5253447 A JP S5253447A JP 12910575 A JP12910575 A JP 12910575A JP 12910575 A JP12910575 A JP 12910575A JP S5253447 A JPS5253447 A JP S5253447A
Authority
JP
Japan
Prior art keywords
measuring method
permitting
rapidly
fall
refractive index
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12910575A
Other languages
Japanese (ja)
Other versions
JPS6024402B2 (en
Inventor
Nobuyoshi Tanaka
Mitsuo Takeda
Kazuya Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP50129105A priority Critical patent/JPS6024402B2/en
Priority to US05/734,245 priority patent/US4072422A/en
Publication of JPS5253447A publication Critical patent/JPS5253447A/en
Publication of JPS6024402B2 publication Critical patent/JPS6024402B2/en
Expired legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE: To measure simply and rapidly the thickness, refractive index or the like of the object being measured in a non-contact and - destructive manner by permitting luminous fluxes having a wave width to fall on the object to form interference fringes by the transmitted and reflected light.
COPYRIGHT: (C)1977,JPO&Japio
JP50129105A 1975-10-27 1975-10-27 Measuring method Expired JPS6024402B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP50129105A JPS6024402B2 (en) 1975-10-27 1975-10-27 Measuring method
US05/734,245 US4072422A (en) 1975-10-27 1976-10-20 Apparatus for interferometrically measuring the physical properties of test object

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP50129105A JPS6024402B2 (en) 1975-10-27 1975-10-27 Measuring method

Publications (2)

Publication Number Publication Date
JPS5253447A true JPS5253447A (en) 1977-04-30
JPS6024402B2 JPS6024402B2 (en) 1985-06-12

Family

ID=15001182

Family Applications (1)

Application Number Title Priority Date Filing Date
JP50129105A Expired JPS6024402B2 (en) 1975-10-27 1975-10-27 Measuring method

Country Status (1)

Country Link
JP (1) JPS6024402B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49109060A (en) * 1973-01-12 1974-10-17

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS49109060A (en) * 1973-01-12 1974-10-17

Also Published As

Publication number Publication date
JPS6024402B2 (en) 1985-06-12

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