JPS6441838A - Measurement of electrooptic effect for thin film - Google Patents

Measurement of electrooptic effect for thin film

Info

Publication number
JPS6441838A
JPS6441838A JP62197289A JP19728987A JPS6441838A JP S6441838 A JPS6441838 A JP S6441838A JP 62197289 A JP62197289 A JP 62197289A JP 19728987 A JP19728987 A JP 19728987A JP S6441838 A JPS6441838 A JP S6441838A
Authority
JP
Japan
Prior art keywords
variation
thin film
wavelength
light
received
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62197289A
Other languages
Japanese (ja)
Other versions
JPH0810190B2 (en
Inventor
Takayoshi Kobayashi
Hisao Uchiki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Kasei Corp
Original Assignee
Mitsubishi Kasei Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Kasei Corp filed Critical Mitsubishi Kasei Corp
Priority to JP62197289A priority Critical patent/JPH0810190B2/en
Publication of JPS6441838A publication Critical patent/JPS6441838A/en
Publication of JPH0810190B2 publication Critical patent/JPH0810190B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Instrument Details And Bridges, And Automatic Balancing Devices (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

PURPOSE:To achieve a measurement at a low voltage eliminating the need for handling polarization, by a method wherein semi-transparent metal films are arranged facing each other on both surfaces of a thin film sample to build a Fabry-Perot resonator and monochromatic light is made incident to determine changes in the intensity thereof. CONSTITUTION:A metal film 17b is formed on a glass substrate 17a, a thin film sample 17c is provided thereon and further, a metal film 17d is formed thereon to build a Fabry-Perot resonator with the metal films 17b and 17d parallelling each other. With an output of a pulse generator 18 to zero, a stepping motor 14 is driven to change the wavelength of a spectroscope 13 so that light transmitted through a sample body 17 at each wavelength is received with a photodiode. Then, light is varied in the wavelength applying a pulse with a known peak value by a pulse generator 18 and received with a photodiode 20. Variation of transmission during the application of voltage is determined depending on the quantity of light received and thus, a variation of refraction is obtained from a relationship previously determined between the variation of transmission and variation of refractive index.
JP62197289A 1987-08-08 1987-08-08 Method for measuring electro-optic effect of thin film Expired - Fee Related JPH0810190B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62197289A JPH0810190B2 (en) 1987-08-08 1987-08-08 Method for measuring electro-optic effect of thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62197289A JPH0810190B2 (en) 1987-08-08 1987-08-08 Method for measuring electro-optic effect of thin film

Publications (2)

Publication Number Publication Date
JPS6441838A true JPS6441838A (en) 1989-02-14
JPH0810190B2 JPH0810190B2 (en) 1996-01-31

Family

ID=16371987

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62197289A Expired - Fee Related JPH0810190B2 (en) 1987-08-08 1987-08-08 Method for measuring electro-optic effect of thin film

Country Status (1)

Country Link
JP (1) JPH0810190B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0372239A (en) * 1989-08-03 1991-03-27 Hartmann & Braun Ag Interference measuring analyzer

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5020748A (en) * 1973-06-21 1975-03-05
JPS533363A (en) * 1976-06-30 1978-01-13 Canon Inc Measurement method and measurement device
JPS63205543A (en) * 1987-02-20 1988-08-25 Fujitsu Ltd Method for evaluating electrooptic effect

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5020748A (en) * 1973-06-21 1975-03-05
JPS533363A (en) * 1976-06-30 1978-01-13 Canon Inc Measurement method and measurement device
JPS63205543A (en) * 1987-02-20 1988-08-25 Fujitsu Ltd Method for evaluating electrooptic effect

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0372239A (en) * 1989-08-03 1991-03-27 Hartmann & Braun Ag Interference measuring analyzer

Also Published As

Publication number Publication date
JPH0810190B2 (en) 1996-01-31

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees