JPS53141591A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS53141591A JPS53141591A JP5671977A JP5671977A JPS53141591A JP S53141591 A JPS53141591 A JP S53141591A JP 5671977 A JP5671977 A JP 5671977A JP 5671977 A JP5671977 A JP 5671977A JP S53141591 A JPS53141591 A JP S53141591A
- Authority
- JP
- Japan
- Prior art keywords
- film
- base region
- manufacture
- semiconductor device
- poly crystal
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- 239000013078 crystal Substances 0.000 abstract 2
- 229910052581 Si3N4 Inorganic materials 0.000 abstract 1
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 239000012535 impurity Substances 0.000 abstract 1
- 238000002347 injection Methods 0.000 abstract 1
- 239000007924 injection Substances 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Landscapes
- Bipolar Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5671977A JPS53141591A (en) | 1977-05-16 | 1977-05-16 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5671977A JPS53141591A (en) | 1977-05-16 | 1977-05-16 | Manufacture of semiconductor device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS53141591A true JPS53141591A (en) | 1978-12-09 |
| JPS6330787B2 JPS6330787B2 (enrdf_load_stackoverflow) | 1988-06-21 |
Family
ID=13035286
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5671977A Granted JPS53141591A (en) | 1977-05-16 | 1977-05-16 | Manufacture of semiconductor device |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS53141591A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518387U (enrdf_load_stackoverflow) * | 1978-07-25 | 1980-02-05 | ||
| JPS5530807A (en) * | 1978-08-25 | 1980-03-04 | Hitachi Ltd | Producing method of semiconductor device |
| JPS5763856A (en) * | 1980-10-07 | 1982-04-17 | Oki Electric Ind Co Ltd | Preparationof semiconductor element |
| JPS58106865A (ja) * | 1981-12-19 | 1983-06-25 | Oki Electric Ind Co Ltd | 半導体素子の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6135705A (ja) * | 1984-07-26 | 1986-02-20 | 株式会社富士トレーラー製作所 | 整畦機の盛土装置 |
-
1977
- 1977-05-16 JP JP5671977A patent/JPS53141591A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6135705A (ja) * | 1984-07-26 | 1986-02-20 | 株式会社富士トレーラー製作所 | 整畦機の盛土装置 |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5518387U (enrdf_load_stackoverflow) * | 1978-07-25 | 1980-02-05 | ||
| JPS5530807A (en) * | 1978-08-25 | 1980-03-04 | Hitachi Ltd | Producing method of semiconductor device |
| JPS5763856A (en) * | 1980-10-07 | 1982-04-17 | Oki Electric Ind Co Ltd | Preparationof semiconductor element |
| JPS58106865A (ja) * | 1981-12-19 | 1983-06-25 | Oki Electric Ind Co Ltd | 半導体素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6330787B2 (enrdf_load_stackoverflow) | 1988-06-21 |
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